JPS6395240U - - Google Patents

Info

Publication number
JPS6395240U
JPS6395240U JP19022986U JP19022986U JPS6395240U JP S6395240 U JPS6395240 U JP S6395240U JP 19022986 U JP19022986 U JP 19022986U JP 19022986 U JP19022986 U JP 19022986U JP S6395240 U JPS6395240 U JP S6395240U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
drying device
supports
forth
extends
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19022986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19022986U priority Critical patent/JPS6395240U/ja
Publication of JPS6395240U publication Critical patent/JPS6395240U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP19022986U 1986-12-10 1986-12-10 Pending JPS6395240U (US20090177143A1-20090709-C00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19022986U JPS6395240U (US20090177143A1-20090709-C00008.png) 1986-12-10 1986-12-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19022986U JPS6395240U (US20090177143A1-20090709-C00008.png) 1986-12-10 1986-12-10

Publications (1)

Publication Number Publication Date
JPS6395240U true JPS6395240U (US20090177143A1-20090709-C00008.png) 1988-06-20

Family

ID=31143257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19022986U Pending JPS6395240U (US20090177143A1-20090709-C00008.png) 1986-12-10 1986-12-10

Country Status (1)

Country Link
JP (1) JPS6395240U (US20090177143A1-20090709-C00008.png)

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