JPS6393642U - - Google Patents

Info

Publication number
JPS6393642U
JPS6393642U JP18823986U JP18823986U JPS6393642U JP S6393642 U JPS6393642 U JP S6393642U JP 18823986 U JP18823986 U JP 18823986U JP 18823986 U JP18823986 U JP 18823986U JP S6393642 U JPS6393642 U JP S6393642U
Authority
JP
Japan
Prior art keywords
insulating
heating
semiconductor wafer
stand
cooling device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18823986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18823986U priority Critical patent/JPS6393642U/ja
Publication of JPS6393642U publication Critical patent/JPS6393642U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP18823986U 1986-12-05 1986-12-05 Pending JPS6393642U (US07714131-20100511-C00024.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18823986U JPS6393642U (US07714131-20100511-C00024.png) 1986-12-05 1986-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18823986U JPS6393642U (US07714131-20100511-C00024.png) 1986-12-05 1986-12-05

Publications (1)

Publication Number Publication Date
JPS6393642U true JPS6393642U (US07714131-20100511-C00024.png) 1988-06-17

Family

ID=31139417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18823986U Pending JPS6393642U (US07714131-20100511-C00024.png) 1986-12-05 1986-12-05

Country Status (1)

Country Link
JP (1) JPS6393642U (US07714131-20100511-C00024.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029546A (ja) * 1988-06-29 1990-01-12 Tokuda Seisakusho Ltd 静電チャック
JPH11354527A (ja) * 1998-06-10 1999-12-24 Sukegawa Electric Co Ltd 板体加熱装置
JP2014090167A (ja) * 2012-10-11 2014-05-15 Lam Research Corporation 剥離乾燥装置及び方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029546A (ja) * 1988-06-29 1990-01-12 Tokuda Seisakusho Ltd 静電チャック
JPH11354527A (ja) * 1998-06-10 1999-12-24 Sukegawa Electric Co Ltd 板体加熱装置
JP2014090167A (ja) * 2012-10-11 2014-05-15 Lam Research Corporation 剥離乾燥装置及び方法

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