JPS6390830U - - Google Patents

Info

Publication number
JPS6390830U
JPS6390830U JP18546186U JP18546186U JPS6390830U JP S6390830 U JPS6390830 U JP S6390830U JP 18546186 U JP18546186 U JP 18546186U JP 18546186 U JP18546186 U JP 18546186U JP S6390830 U JPS6390830 U JP S6390830U
Authority
JP
Japan
Prior art keywords
flow rate
discharge
vacuum chamber
discharge gas
control valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18546186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18546186U priority Critical patent/JPS6390830U/ja
Publication of JPS6390830U publication Critical patent/JPS6390830U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP18546186U 1986-12-03 1986-12-03 Pending JPS6390830U (US07968547-20110628-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18546186U JPS6390830U (US07968547-20110628-C00004.png) 1986-12-03 1986-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18546186U JPS6390830U (US07968547-20110628-C00004.png) 1986-12-03 1986-12-03

Publications (1)

Publication Number Publication Date
JPS6390830U true JPS6390830U (US07968547-20110628-C00004.png) 1988-06-13

Family

ID=31134108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18546186U Pending JPS6390830U (US07968547-20110628-C00004.png) 1986-12-03 1986-12-03

Country Status (1)

Country Link
JP (1) JPS6390830U (US07968547-20110628-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010205477A (ja) * 2009-03-02 2010-09-16 Nissin Ion Equipment Co Ltd ガス制御装置、ガス制御装置の制御方法及びそれらを用いたイオン注入装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010205477A (ja) * 2009-03-02 2010-09-16 Nissin Ion Equipment Co Ltd ガス制御装置、ガス制御装置の制御方法及びそれらを用いたイオン注入装置

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