JPS6390434U - - Google Patents

Info

Publication number
JPS6390434U
JPS6390434U JP18651586U JP18651586U JPS6390434U JP S6390434 U JPS6390434 U JP S6390434U JP 18651586 U JP18651586 U JP 18651586U JP 18651586 U JP18651586 U JP 18651586U JP S6390434 U JPS6390434 U JP S6390434U
Authority
JP
Japan
Prior art keywords
vacuum chamber
purge gas
protrusion
gas
diffuser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18651586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18651586U priority Critical patent/JPS6390434U/ja
Publication of JPS6390434U publication Critical patent/JPS6390434U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Filling Or Discharging Of Gas Storage Vessels (AREA)
JP18651586U 1986-12-03 1986-12-03 Pending JPS6390434U (US20100223739A1-20100909-C00025.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18651586U JPS6390434U (US20100223739A1-20100909-C00025.png) 1986-12-03 1986-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18651586U JPS6390434U (US20100223739A1-20100909-C00025.png) 1986-12-03 1986-12-03

Publications (1)

Publication Number Publication Date
JPS6390434U true JPS6390434U (US20100223739A1-20100909-C00025.png) 1988-06-11

Family

ID=31136139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18651586U Pending JPS6390434U (US20100223739A1-20100909-C00025.png) 1986-12-03 1986-12-03

Country Status (1)

Country Link
JP (1) JPS6390434U (US20100223739A1-20100909-C00025.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992015005A1 (en) * 1991-02-18 1992-09-03 Osaka Sanso Kogyo Kabushiki-Kaisha Device for sampling gas

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992015005A1 (en) * 1991-02-18 1992-09-03 Osaka Sanso Kogyo Kabushiki-Kaisha Device for sampling gas

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