JPS6389523U - - Google Patents

Info

Publication number
JPS6389523U
JPS6389523U JP1986184208U JP18420886U JPS6389523U JP S6389523 U JPS6389523 U JP S6389523U JP 1986184208 U JP1986184208 U JP 1986184208U JP 18420886 U JP18420886 U JP 18420886U JP S6389523 U JPS6389523 U JP S6389523U
Authority
JP
Japan
Prior art keywords
chamber
port
suction port
exhaust port
partition plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986184208U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986184208U priority Critical patent/JPS6389523U/ja
Publication of JPS6389523U publication Critical patent/JPS6389523U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Duct Arrangements (AREA)
JP1986184208U 1986-11-28 1986-11-28 Pending JPS6389523U (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986184208U JPS6389523U (US20080094685A1-20080424-C00004.png) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986184208U JPS6389523U (US20080094685A1-20080424-C00004.png) 1986-11-28 1986-11-28

Publications (1)

Publication Number Publication Date
JPS6389523U true JPS6389523U (US20080094685A1-20080424-C00004.png) 1988-06-10

Family

ID=31131664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986184208U Pending JPS6389523U (US20080094685A1-20080424-C00004.png) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPS6389523U (US20080094685A1-20080424-C00004.png)

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