JPS6389246U - - Google Patents

Info

Publication number
JPS6389246U
JPS6389246U JP18521486U JP18521486U JPS6389246U JP S6389246 U JPS6389246 U JP S6389246U JP 18521486 U JP18521486 U JP 18521486U JP 18521486 U JP18521486 U JP 18521486U JP S6389246 U JPS6389246 U JP S6389246U
Authority
JP
Japan
Prior art keywords
wafer
contact
cut
displacing
inwardly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18521486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18521486U priority Critical patent/JPS6389246U/ja
Publication of JPS6389246U publication Critical patent/JPS6389246U/ja
Pending legal-status Critical Current

Links

JP18521486U 1986-12-01 1986-12-01 Pending JPS6389246U (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18521486U JPS6389246U (US06373033-20020416-M00071.png) 1986-12-01 1986-12-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18521486U JPS6389246U (US06373033-20020416-M00071.png) 1986-12-01 1986-12-01

Publications (1)

Publication Number Publication Date
JPS6389246U true JPS6389246U (US06373033-20020416-M00071.png) 1988-06-10

Family

ID=31133628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18521486U Pending JPS6389246U (US06373033-20020416-M00071.png) 1986-12-01 1986-12-01

Country Status (1)

Country Link
JP (1) JPS6389246U (US06373033-20020416-M00071.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11289002A (ja) * 1998-04-03 1999-10-19 Toshiba Microelectronics Corp 枚葉処理機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11289002A (ja) * 1998-04-03 1999-10-19 Toshiba Microelectronics Corp 枚葉処理機構

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