JPS6384938U - - Google Patents

Info

Publication number

JPS6384938U

JPS6384938U JP17970286U JP17970286U JPS6384938U JP S6384938 U JPS6384938 U JP S6384938U JP 17970286 U JP17970286 U JP 17970286U JP 17970286 U JP17970286 U JP 17970286U JP S6384938 U JPS6384938 U JP S6384938U

Authority

JP

Japan

Prior art keywords

film

substrate

group element

compound semiconductor

thin film

Prior art date

1986-11-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010408 film Substances 0.000 claims 4
• 239000004065 semiconductor Substances 0.000 claims 4
• 239000000758 substrate Substances 0.000 claims 3
• 150000001875 compounds Chemical class 0.000 claims 2
• 239000010409 thin film Substances 0.000 claims 2
• 229910004298 SiO 2 Inorganic materials 0.000 description 1
• WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1