JPS638419B2 - - Google Patents

Info

Publication number
JPS638419B2
JPS638419B2 JP2844479A JP2844479A JPS638419B2 JP S638419 B2 JPS638419 B2 JP S638419B2 JP 2844479 A JP2844479 A JP 2844479A JP 2844479 A JP2844479 A JP 2844479A JP S638419 B2 JPS638419 B2 JP S638419B2
Authority
JP
Japan
Prior art keywords
level
pattern
signal
black
white
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2844479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55121137A (en
Inventor
Yoshifusa Wada
Yasuhide Hisamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP2844479A priority Critical patent/JPS55121137A/ja
Publication of JPS55121137A publication Critical patent/JPS55121137A/ja
Publication of JPS638419B2 publication Critical patent/JPS638419B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2844479A 1979-03-12 1979-03-12 Pattern check unit Granted JPS55121137A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2844479A JPS55121137A (en) 1979-03-12 1979-03-12 Pattern check unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2844479A JPS55121137A (en) 1979-03-12 1979-03-12 Pattern check unit

Publications (2)

Publication Number Publication Date
JPS55121137A JPS55121137A (en) 1980-09-18
JPS638419B2 true JPS638419B2 (enrdf_load_stackoverflow) 1988-02-23

Family

ID=12248840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2844479A Granted JPS55121137A (en) 1979-03-12 1979-03-12 Pattern check unit

Country Status (1)

Country Link
JP (1) JPS55121137A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS55121137A (en) 1980-09-18

Similar Documents

Publication Publication Date Title
US6509966B2 (en) Optical system for detecting surface defect and surface defect tester using the same
US6617603B2 (en) Surface defect tester
GB1493861A (en) Method and apparatus for detecting defects in photomasks
JP4467588B2 (ja) 試料検査装置及び吸収電流像の作成方法
US4652765A (en) Edge detecting device in optical measuring instrument
JPH11153549A (ja) 表面検査方法及びその方法を用いる表面検査装置
JPS638419B2 (enrdf_load_stackoverflow)
US5067812A (en) Systems for inspecting defects in an optical recording medium
KR19990063461A (ko) 형상 검사 방법 및 장치
JPS6365883B2 (enrdf_load_stackoverflow)
JPH0933237A (ja) 測定プローブ
JPH06160302A (ja) 走行ストリップの表面疵検査方法及び装置
JPS6327642B2 (enrdf_load_stackoverflow)
JPS62212509A (ja) 電子ビ−ム測長装置
JPH05248836A (ja) パターン検査装置
JP2658871B2 (ja) 電子線露光におけるマーク位置検出方法およびその装置
JPH10227617A (ja) 微小線幅測定方法及び微小線幅測定装置
JPS63209099A (ja) ピ−ク値検出回路
JPS62118243A (ja) 表面欠陥検査装置
KR200158121Y1 (ko) 노광기 간섭계의 레이저 출력 측정 회로
JPS61114116A (ja) 寸法測長装置
JPH05273349A (ja) レーザードップラ速度計の信号処理装置
JPS60200113A (ja) 線幅測定方法およびその装置
JP2682808B2 (ja) 走査レーザ光のパワー測定装置
JPS5830521B2 (ja) 寸法測定器