JPS6384036U - - Google Patents

Info

Publication number
JPS6384036U
JPS6384036U JP17841486U JP17841486U JPS6384036U JP S6384036 U JPS6384036 U JP S6384036U JP 17841486 U JP17841486 U JP 17841486U JP 17841486 U JP17841486 U JP 17841486U JP S6384036 U JPS6384036 U JP S6384036U
Authority
JP
Japan
Prior art keywords
case
supply device
fast
predetermined position
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17841486U
Other languages
Japanese (ja)
Other versions
JPH0313473Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986178414U priority Critical patent/JPH0313473Y2/ja
Publication of JPS6384036U publication Critical patent/JPS6384036U/ja
Application granted granted Critical
Publication of JPH0313473Y2 publication Critical patent/JPH0313473Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係る基板供給装置の正面図、
第２図は本考案の他の実施例を示す略示図、第３
図は第２図の部の詳細図である。 ２……ボールねじ（微小送り機構）、１１……
ピツチ送り機構（微小送り機構）、１３……電磁
クラツチ（微小送り機構）、１６……シリンダ（
早送り機構）、１０……ケース、Ａ……基板。 FIG. 1 is a front view of the substrate supply device according to the present invention;
FIG. 2 is a schematic diagram showing another embodiment of the present invention;
The figure is a detailed view of the section shown in FIG. 2. 2...Ball screw (fine feed mechanism), 11...
Pitch feed mechanism (fine feed mechanism), 13... Electromagnetic clutch (fine feed mechanism), 16... Cylinder (
Rapid forwarding mechanism), 10... Case, A... Board.

Claims (1)

【実用新案登録請求の範囲】 基板を収容したケースを所定の位置に位置決め
する基板供給装置において、 前記ケースを所定の位置に早送りする早送り機
構と、 該早送り機構の作動停止後にピツチ送りによつ
て前記ケースの位置決めを行う微小送り機構とを
有することを特徴とする基板供給装置。[Scope of Utility Model Registration Claim] A substrate supply device that positions a case containing a substrate at a predetermined position, comprising: a fast-forwarding mechanism that rapidly transports the case to a predetermined position; and a pitch-feeding mechanism after the fast-forwarding mechanism stops operating. A substrate supply device comprising: a minute feed mechanism for positioning the case.
JP1986178414U 1986-11-20 1986-11-20 Expired JPH0313473Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986178414U JPH0313473Y2 (en) 1986-11-20 1986-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986178414U JPH0313473Y2 (en) 1986-11-20 1986-11-20

Publications (2)

Publication Number Publication Date
JPS6384036U true JPS6384036U (en) 1988-06-02
JPH0313473Y2 JPH0313473Y2 (en) 1991-03-27

Family

ID=31120522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986178414U Expired JPH0313473Y2 (en) 1986-11-20 1986-11-20

Country Status (1)

Country Link
JP (1) JPH0313473Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101283354B1 (en) * 2007-08-17 2013-07-08 세메스 주식회사 Gripper for transferring semiconductor device
JP2016068364A (en) * 2014-09-30 2016-05-09 株式会社小森コーポレーション Rotary screen device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431301A (en) * 1977-08-09 1979-03-08 Ricoh Kk Paper feeder
JPS5737937U (en) * 1980-08-15 1982-02-27
JPS5969324A (en) * 1982-10-12 1984-04-19 Toshiba Seiki Kk Pitch feed for magazine
JPS60102329A (en) * 1983-11-09 1985-06-06 Matsushita Electric Ind Co Ltd Thin plate carrier
JPS611731U (en) * 1984-06-12 1986-01-08 日産自動車株式会社 Fluid-filled vibration isolator

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099212A (en) * 1976-10-04 1978-07-04 Ampex Corporation Rotating transducing head assembly

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431301A (en) * 1977-08-09 1979-03-08 Ricoh Kk Paper feeder
JPS5737937U (en) * 1980-08-15 1982-02-27
JPS5969324A (en) * 1982-10-12 1984-04-19 Toshiba Seiki Kk Pitch feed for magazine
JPS60102329A (en) * 1983-11-09 1985-06-06 Matsushita Electric Ind Co Ltd Thin plate carrier
JPS611731U (en) * 1984-06-12 1986-01-08 日産自動車株式会社 Fluid-filled vibration isolator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101283354B1 (en) * 2007-08-17 2013-07-08 세메스 주식회사 Gripper for transferring semiconductor device
JP2016068364A (en) * 2014-09-30 2016-05-09 株式会社小森コーポレーション Rotary screen device

Also Published As

Publication number Publication date
JPH0313473Y2 (en) 1991-03-27

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