JPS6381862U - - Google Patents

Info

Publication number
JPS6381862U
JPS6381862U JP17444886U JP17444886U JPS6381862U JP S6381862 U JPS6381862 U JP S6381862U JP 17444886 U JP17444886 U JP 17444886U JP 17444886 U JP17444886 U JP 17444886U JP S6381862 U JPS6381862 U JP S6381862U
Authority
JP
Japan
Prior art keywords
annular recess
electromagnet
yoke
magnetron sputter
sputter device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17444886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17444886U priority Critical patent/JPS6381862U/ja
Publication of JPS6381862U publication Critical patent/JPS6381862U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17444886U 1986-11-13 1986-11-13 Pending JPS6381862U (US08124317-20120228-C00026.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17444886U JPS6381862U (US08124317-20120228-C00026.png) 1986-11-13 1986-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17444886U JPS6381862U (US08124317-20120228-C00026.png) 1986-11-13 1986-11-13

Publications (1)

Publication Number Publication Date
JPS6381862U true JPS6381862U (US08124317-20120228-C00026.png) 1988-05-30

Family

ID=31112841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17444886U Pending JPS6381862U (US08124317-20120228-C00026.png) 1986-11-13 1986-11-13

Country Status (1)

Country Link
JP (1) JPS6381862U (US08124317-20120228-C00026.png)

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