JPS6381860U - - Google Patents

Info

Publication number

JPS6381860U

JPS6381860U JP17386486U JP17386486U JPS6381860U JP S6381860 U JPS6381860 U JP S6381860U JP 17386486 U JP17386486 U JP 17386486U JP 17386486 U JP17386486 U JP 17386486U JP S6381860 U JPS6381860 U JP S6381860U

Authority

JP

Japan

Prior art keywords

backing plate

sputtering target

target

target structure

spacer

Prior art date

1986-11-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 125000006850 spacer group Chemical group 0.000 claims description 4
• 238000005477 sputtering target Methods 0.000 claims description 4
• 239000000853 adhesive Substances 0.000 claims description 3
• 230000001070 adhesive effect Effects 0.000 claims description 3
• 239000012790 adhesive layer Substances 0.000 claims 1
• 239000000463 material Substances 0.000 description 1
• 229910000679 solder Inorganic materials 0.000 description 1

Cited By (1)