JPS638133Y2 - - Google Patents

Info

Publication number
JPS638133Y2
JPS638133Y2 JP7183683U JP7183683U JPS638133Y2 JP S638133 Y2 JPS638133 Y2 JP S638133Y2 JP 7183683 U JP7183683 U JP 7183683U JP 7183683 U JP7183683 U JP 7183683U JP S638133 Y2 JPS638133 Y2 JP S638133Y2
Authority
JP
Japan
Prior art keywords
output
flop
wafer
inverter
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7183683U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59176148U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7183683U priority Critical patent/JPS59176148U/ja
Publication of JPS59176148U publication Critical patent/JPS59176148U/ja
Application granted granted Critical
Publication of JPS638133Y2 publication Critical patent/JPS638133Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Controlling Sheets Or Webs (AREA)
  • Control Of Position Or Direction (AREA)
JP7183683U 1983-05-12 1983-05-12 半導体ウエハ−の移動検出装置 Granted JPS59176148U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7183683U JPS59176148U (ja) 1983-05-12 1983-05-12 半導体ウエハ−の移動検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7183683U JPS59176148U (ja) 1983-05-12 1983-05-12 半導体ウエハ−の移動検出装置

Publications (2)

Publication Number Publication Date
JPS59176148U JPS59176148U (ja) 1984-11-24
JPS638133Y2 true JPS638133Y2 (en, 2012) 1988-03-10

Family

ID=30201989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7183683U Granted JPS59176148U (ja) 1983-05-12 1983-05-12 半導体ウエハ−の移動検出装置

Country Status (1)

Country Link
JP (1) JPS59176148U (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0638019Y2 (ja) * 1986-09-30 1994-10-05 大日本スクリ−ン製造株式会社 基板処理装置における基板搬送装置

Also Published As

Publication number Publication date
JPS59176148U (ja) 1984-11-24

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