JPS6380842U - - Google Patents

Info

Publication number

JPS6380842U

JPS6380842U JP17581186U JP17581186U JPS6380842U JP S6380842 U JPS6380842 U JP S6380842U JP 17581186 U JP17581186 U JP 17581186U JP 17581186 U JP17581186 U JP 17581186U JP S6380842 U JPS6380842 U JP S6380842U

Authority

JP

Japan

Prior art keywords

substrate

board

holding jig

holding

window

Prior art date

1986-11-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 9
• 229910052751 metal Inorganic materials 0.000 claims description 4
• 239000002184 metal Substances 0.000 claims description 4
• 239000013078 crystal Substances 0.000 claims 1
• 238000002109 crystal growth method Methods 0.000 claims 1
• 230000001678 irradiating effect Effects 0.000 claims 1
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
• 229910052721 tungsten Inorganic materials 0.000 claims 1
• 239000010937 tungsten Substances 0.000 claims 1