JPS637452U - - Google Patents

Info

Publication number

JPS637452U

JPS637452U JP9981786U JP9981786U JPS637452U JP S637452 U JPS637452 U JP S637452U JP 9981786 U JP9981786 U JP 9981786U JP 9981786 U JP9981786 U JP 9981786U JP S637452 U JPS637452 U JP S637452U

Authority

JP

Japan

Prior art keywords

polishing

workpiece

polishing cloth

air

processed

Prior art date

1986-07-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005498 polishing Methods 0.000 claims description 11
• 239000004744 fabric Substances 0.000 claims description 5
• 238000007664 blowing Methods 0.000 claims description 4
• 238000001035 drying Methods 0.000 claims description 3
• 239000007788 liquid Substances 0.000 claims 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1