JPS6373936U - - Google Patents
Info
- Publication number
- JPS6373936U JPS6373936U JP16819186U JP16819186U JPS6373936U JP S6373936 U JPS6373936 U JP S6373936U JP 16819186 U JP16819186 U JP 16819186U JP 16819186 U JP16819186 U JP 16819186U JP S6373936 U JPS6373936 U JP S6373936U
- Authority
- JP
- Japan
- Prior art keywords
- cassettes
- exhaust
- partition wall
- transport
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986168191U JPH0541553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-11-04 | 1986-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986168191U JPH0541553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-11-04 | 1986-11-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6373936U true JPS6373936U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-17 |
| JPH0541553Y2 JPH0541553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-10-20 |
Family
ID=31100840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986168191U Expired - Lifetime JPH0541553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-11-04 | 1986-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0541553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04182222A (ja) * | 1990-11-16 | 1992-06-29 | Sanki Eng Co Ltd | リニアクリーンチューブ搬送装置 |
| US10640132B2 (en) | 2016-10-12 | 2020-05-05 | Daifuku Co., Ltd. | Article transport facility |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5587650A (en) * | 1978-12-26 | 1980-07-02 | Tokyo Shibaura Electric Co | Conveyor |
| JPS58116300U (ja) * | 1982-02-02 | 1983-08-08 | 日本電気株式会社 | コンベヤ装置 |
-
1986
- 1986-11-04 JP JP1986168191U patent/JPH0541553Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5587650A (en) * | 1978-12-26 | 1980-07-02 | Tokyo Shibaura Electric Co | Conveyor |
| JPS58116300U (ja) * | 1982-02-02 | 1983-08-08 | 日本電気株式会社 | コンベヤ装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04182222A (ja) * | 1990-11-16 | 1992-06-29 | Sanki Eng Co Ltd | リニアクリーンチューブ搬送装置 |
| US10640132B2 (en) | 2016-10-12 | 2020-05-05 | Daifuku Co., Ltd. | Article transport facility |
| TWI736674B (zh) * | 2016-10-12 | 2021-08-21 | 日商大福股份有限公司 | 物品搬送設備 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0541553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-10-20 |