JPS6370151U - - Google Patents

Info

Publication number
JPS6370151U
JPS6370151U JP16522286U JP16522286U JPS6370151U JP S6370151 U JPS6370151 U JP S6370151U JP 16522286 U JP16522286 U JP 16522286U JP 16522286 U JP16522286 U JP 16522286U JP S6370151 U JPS6370151 U JP S6370151U
Authority
JP
Japan
Prior art keywords
wafer
wall
recess
circumference
contacting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16522286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16522286U priority Critical patent/JPS6370151U/ja
Publication of JPS6370151U publication Critical patent/JPS6370151U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP16522286U 1986-10-27 1986-10-27 Pending JPS6370151U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16522286U JPS6370151U (US20090163788A1-20090625-C00002.png) 1986-10-27 1986-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16522286U JPS6370151U (US20090163788A1-20090625-C00002.png) 1986-10-27 1986-10-27

Publications (1)

Publication Number Publication Date
JPS6370151U true JPS6370151U (US20090163788A1-20090625-C00002.png) 1988-05-11

Family

ID=31095061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16522286U Pending JPS6370151U (US20090163788A1-20090625-C00002.png) 1986-10-27 1986-10-27

Country Status (1)

Country Link
JP (1) JPS6370151U (US20090163788A1-20090625-C00002.png)

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