JPS6367841U - - Google Patents
Info
- Publication number
- JPS6367841U JPS6367841U JP16058586U JP16058586U JPS6367841U JP S6367841 U JPS6367841 U JP S6367841U JP 16058586 U JP16058586 U JP 16058586U JP 16058586 U JP16058586 U JP 16058586U JP S6367841 U JPS6367841 U JP S6367841U
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- semiconductor
- diaphragm
- semiconductor substrate
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims 2
- 238000002844 melting Methods 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 229910052754 neon Inorganic materials 0.000 claims 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16058586U JPS6367841U (US07754267-20100713-C00021.png) | 1986-10-20 | 1986-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16058586U JPS6367841U (US07754267-20100713-C00021.png) | 1986-10-20 | 1986-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367841U true JPS6367841U (US07754267-20100713-C00021.png) | 1988-05-07 |
Family
ID=31086101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16058586U Pending JPS6367841U (US07754267-20100713-C00021.png) | 1986-10-20 | 1986-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367841U (US07754267-20100713-C00021.png) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS535981A (en) * | 1976-07-06 | 1978-01-19 | Toyoda Chuo Kenkyusho Kk | Method of producing semiconductor device |
| JPS53125880A (en) * | 1977-04-08 | 1978-11-02 | Toyoda Chuo Kenkyusho Kk | Pressure converter |
| JPS5873166A (ja) * | 1981-10-13 | 1983-05-02 | ユナイテツド・テクノロジ−ズ・コ−ポレイシヨン | 容量性圧力トランスジューサの製造方法 |
| JPS61230382A (ja) * | 1985-04-05 | 1986-10-14 | Yokogawa Electric Corp | 半導体圧力センサ |
| JPS61233407A (ja) * | 1985-04-08 | 1986-10-17 | Hitachi Metals Ltd | 磁気ヘツドの製造方法 |
-
1986
- 1986-10-20 JP JP16058586U patent/JPS6367841U/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS535981A (en) * | 1976-07-06 | 1978-01-19 | Toyoda Chuo Kenkyusho Kk | Method of producing semiconductor device |
| JPS53125880A (en) * | 1977-04-08 | 1978-11-02 | Toyoda Chuo Kenkyusho Kk | Pressure converter |
| JPS5873166A (ja) * | 1981-10-13 | 1983-05-02 | ユナイテツド・テクノロジ−ズ・コ−ポレイシヨン | 容量性圧力トランスジューサの製造方法 |
| JPS61230382A (ja) * | 1985-04-05 | 1986-10-14 | Yokogawa Electric Corp | 半導体圧力センサ |
| JPS61233407A (ja) * | 1985-04-08 | 1986-10-17 | Hitachi Metals Ltd | 磁気ヘツドの製造方法 |
