JPS6365250U - - Google Patents

Info

Publication number
JPS6365250U
JPS6365250U JP15963686U JP15963686U JPS6365250U JP S6365250 U JPS6365250 U JP S6365250U JP 15963686 U JP15963686 U JP 15963686U JP 15963686 U JP15963686 U JP 15963686U JP S6365250 U JPS6365250 U JP S6365250U
Authority
JP
Japan
Prior art keywords
groove
insulating film
substrate
semiconductor device
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15963686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15963686U priority Critical patent/JPS6365250U/ja
Publication of JPS6365250U publication Critical patent/JPS6365250U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP15963686U 1986-10-17 1986-10-17 Pending JPS6365250U (US06262066-20010717-C00315.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15963686U JPS6365250U (US06262066-20010717-C00315.png) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15963686U JPS6365250U (US06262066-20010717-C00315.png) 1986-10-17 1986-10-17

Publications (1)

Publication Number Publication Date
JPS6365250U true JPS6365250U (US06262066-20010717-C00315.png) 1988-04-30

Family

ID=31084254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15963686U Pending JPS6365250U (US06262066-20010717-C00315.png) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPS6365250U (US06262066-20010717-C00315.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS605074A (ja) * 1983-06-22 1985-01-11 日本タングステン株式会社 炭化ケイ素焼結体及びその製造方法
JPS60261164A (ja) * 1984-06-07 1985-12-24 Nippon Telegr & Teleph Corp <Ntt> 溝型mosキヤパシタの製法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS605074A (ja) * 1983-06-22 1985-01-11 日本タングステン株式会社 炭化ケイ素焼結体及びその製造方法
JPS60261164A (ja) * 1984-06-07 1985-12-24 Nippon Telegr & Teleph Corp <Ntt> 溝型mosキヤパシタの製法

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