JPS6365064A - Micrometer - Google Patents

Micrometer

Info

Publication number
JPS6365064A
JPS6365064A JP20932186A JP20932186A JPS6365064A JP S6365064 A JPS6365064 A JP S6365064A JP 20932186 A JP20932186 A JP 20932186A JP 20932186 A JP20932186 A JP 20932186A JP S6365064 A JPS6365064 A JP S6365064A
Authority
JP
Japan
Prior art keywords
spindle
anvil
micrometer
durability
coating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20932186A
Other languages
Japanese (ja)
Inventor
Hirotsugu Hirota
廣田 博次
Tetsuya Nakadoi
中土井 哲也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Original Assignee
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp, Mitsutoyo Kiko Co Ltd filed Critical Mitutoyo Corp
Priority to JP20932186A priority Critical patent/JPS6365064A/en
Publication of JPS6365064A publication Critical patent/JPS6365064A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve the durability and reliability of a micrometer by providing a super hard layer consisting of the carbide, nitride, carbonitride, etc., of specific metals to at least the tips of the measuring parts of the spindle an anvil of the micrometer. CONSTITUTION:An object to be measured is interpoosed between the spindle 2 and anvil 3 of the micrometer and the tip part 2a thereof is advanced and retreated by the rotation of the spindle 2, by which the length, etc. of the object to be measured are measured. The super hard layer consisting of carbide, nitride and carbonitride (for example, TiC, TiN, SiC, etc.) groups IVa Va, VIa metals of the periodic table and Si, diamond, hard carbon, etc., is formed on tips 2a, 3a of the spindle 2 and anvil 3 3 by a vacuum deposition method, sputtering method, ion plating method, CVD method, PVD method, etc. The durability and reliability which are excellent for a long period of time are thus maintained without the wear of the measuring ends 2a, 3a.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、耐久中信頼性の改善を図ったマイクロメータ
に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a micrometer with improved reliability during durability.

(従来の技術) 従来、ブイクロメータのスピンドルやアンビルとしては
、一般には工具鋼(JIS 5K931等)を素材とし
、これを熱処理してHRC55〜85に硬さを高めたも
のが用いられ、また特例的には先端にHマ1400−1
800の硬さを有する超硬合金のチップをロー付したも
のが用いられていた。
(Prior art) Conventionally, the spindle and anvil of a buikrometer have generally been made of tool steel (JIS 5K931, etc.), which has been heat treated to increase the hardness to HRC 55-85. H-ma 1400-1 at the tip
A brazed cemented carbide tip with a hardness of 800 was used.

(発明が解決しようとする問題点) しかしながら、上記工具鋼を用いたものは耐摩耗性およ
び耐食性が不足して早期に損耗し易・ く、一方超硬合
金を用いたものは、硬さの増大により耐摩耗性は幾分改
善されるものの、局部的に作用する高荷重による凹凸や
摩耗傷の発生が避けられず、結果として、いずれのもの
も平面度や平行度不良を招いて満足する耐久性が得難い
という問題があった。
(Problems to be solved by the invention) However, tools using the above-mentioned tool steel lack wear resistance and corrosion resistance and are prone to early wear, while tools using cemented carbide have poor hardness. Although the wear resistance is improved somewhat by increasing the size, unevenness and wear scars are unavoidable due to locally applied high loads, and as a result, both result in poor flatness and parallelism and are unsatisfactory. There was a problem that durability was difficult to obtain.

特に最近、スピンドルの移動量を電気的に検出してデジ
タル表示する高グレードのマイクロメータが多用される
ようになってきており、前記スピンドルやアンビルの耐
久性の不足は、マイクロメータの信頼性を損失させる大
きな原因となり、その根本的な解決が望まれていた。
In particular, recently, high-grade micrometers that electrically detect and digitally display the amount of spindle movement have come into widespread use, and the lack of durability of the spindle and anvil has affected the reliability of the micrometer. This was a major cause of losses, and a fundamental solution was desired.

本発明は、上記従来の問題点を解決するためになされた
もので、耐久・信頼性に富むマイクロメータを提供する
ことを目的とする。
The present invention was made to solve the above-mentioned conventional problems, and an object of the present invention is to provide a highly durable and reliable micrometer.

(問題点を解決するための手段) このため、本発明は、スピンドル及びアンビルの少なく
とも測定面に、元素周規律表の■a。
(Means for Solving the Problems) For this reason, the present invention provides at least the measurement surfaces of the spindle and anvil with the elements (a) of the Periodic Table of Elements.

Va、ia属金属又はSiの炭化物、窒化物若しくは炭
窒化物、ダイヤモンド又は硬質炭素(アモルファス)等
の超硬質物質から選ばれた少なくとも一種類の被覆層を
一層又は多層に設けたことを要旨とする。
The gist is that at least one type of coating layer selected from ultra-hard substances such as carbides, nitrides, or carbonitrides of Va, IA group metals or Si, diamond, or hard carbon (amorphous) is provided in one or multiple layers. do.

本発明の対象とするマイクロメータは、その種類を問わ
ないもので、汎用のマイクロメータ、ねじ測定用マイク
ロメータ、歯車測定用マイクロメータ等を対象とするこ
とができる。またそのスピンドル又はアンビルの基材も
、特に限定するものでなく、例えば特殊工具鋼、ダイス
鋼、高m度工具鋼等の特殊鋼あるいは超硬合金を選択す
ることができる。
The micrometer to which the present invention is applied is of any type, and may be a general-purpose micrometer, a micrometer for screw measurement, a micrometer for gear measurement, or the like. Furthermore, the base material of the spindle or anvil is not particularly limited, and may be selected from, for example, special steel such as special tool steel, die steel, and high-strength tool steel, or cemented carbide.

上記被覆層の膜厚は、0.5〜204m程度とするのが
望ましい、これは、0.5μ騰未満では基材の硬さの影
響を受けて表面硬さを高めるのが困難でとなり、一方2
0μ層を超すと、いたずらに経済性の悪化を招く理由に
よる。また特に該膜厚を0.5〜3終■程度とした場合
には、基材の表面粗度がそのま〜被覆層表面に表れるた
め、基材を仕上げ加工(ラッピング等)しておけば被覆
後の仕上げ加工が不要となって、きわめて有利となる。
The thickness of the coating layer is preferably about 0.5 to 204 m. This is because if the thickness is less than 0.5 μm, it will be difficult to increase the surface hardness due to the influence of the hardness of the base material. On the other hand 2
This is because if the thickness exceeds 0μ layer, the economical efficiency will deteriorate unnecessarily. In addition, especially when the film thickness is about 0.5 to 3 cm, the surface roughness of the base material will appear as it is on the surface of the coating layer, so if the base material is finished (wrapped, etc.) This eliminates the need for finishing after coating, which is extremely advantageous.

本発明において被覆層は、スピンドル又はアンビルの測
定面のみ、又はそれらの全体に形成して良いもので、特
にアンビルの全体に形成した場合には、そのねじ部の耐
摩耗性の向上により耐久性の一層の向上を達成できる。
In the present invention, the coating layer may be formed only on the measurement surface of the spindle or anvil, or on the entirety thereof.In particular, when the coating layer is formed on the entirety of the anvil, the durability is improved by improving the wear resistance of the threaded part. Further improvements in performance can be achieved.

被覆層を多層にするには、例えば基材と親和性が大で被
覆の剥離に対して安定なる物質Aを第1被覆層とし、そ
の上に耐摩耗性大なる物質Bを第2被l1層とすること
ができ、この場合、物質Aのみ又は物質Bのみの1層被
覆を行ったものより剥離強度及び耐摩耗性の一層の向上
を達成できる。
In order to make the coating layer multi-layered, for example, a substance A having a high affinity with the base material and being stable against peeling of the coating is used as the first coating layer, and a substance B having high wear resistance is formed on the second coating layer. In this case, a further improvement in peel strength and abrasion resistance can be achieved than with a single layer coating of only substance A or only substance B.

さらに前記被覆層の形成は、化学的および物理的な種々
の技術を採用することが可能で、例えばCVD法、真空
蒸着法、スパッタリング法、イオンメッキ法等がこれに
当る。
Furthermore, various chemical and physical techniques can be employed to form the coating layer, such as CVD, vacuum evaporation, sputtering, ion plating, and the like.

このように設けられた被覆層は、例えば〒iNでHマク
000程度、TiCでHマ3200程度、SiCでHマ
2500程度、ダイヤモンドでHv10000程度の高
硬さとなる。
The coating layer provided in this manner has a high hardness of about 000 Hv for iN, about 3200 Hv for TiC, about 2500 Hv for SiC, and about 10000 Hv for diamond.

(作用) 上記構成のマイクロメータにおいて、スピンドル及びア
ンビルに超硬質物質から成る被覆層を設けたので、測定
面の硬さが上昇すると共に、その摩擦係数が低下し、耐
摩耗性が著しく改善される。またこれと共に耐食性も向
上し、測定面に凹凸あるいは厚耗傷が生じ難くなって、
マイクロメータは全体として著しく耐久・信頼性が向上
するようになる。
(Function) In the micrometer configured as described above, since a coating layer made of an ultra-hard material is provided on the spindle and anvil, the hardness of the measurement surface increases, the friction coefficient thereof decreases, and wear resistance is significantly improved. Ru. Along with this, corrosion resistance has also improved, making it difficult for unevenness or wear and tear to occur on the measurement surface.
The durability and reliability of micrometers as a whole will be significantly improved.

(実施例) 以下、本発明の実施例を添付図面にもとづいて説明する
(Example) Hereinafter, an example of the present invention will be described based on the accompanying drawings.

図は、本発明にか−るデジタル表示マイクロメータを示
したものである。同図において、1はU 字Wフレーム
で、該フレーム1の一端部にはスピンドル2が回転自在
に設けられ、該フレームlの他端部には前記スピンドル
2に対向してアンビル3が固設されている。前記スピン
ドル2のフレーム1外に延びる一端部には嵌合部4を介
してシンプル5が一体的に被嵌されており、一方フレー
ム1には、前記スピンドル2とシンプル5との間に延び
て該スピンドル2にねじ部7を介して螺合するスリーブ
8が、保持部材9を介して固定されている。すなわち、
シンプル5の回転動作に追従して、スピンドル2はアン
ビル3に向けて進退動することができるようになってい
る。
The figure shows a digital display micrometer according to the present invention. In the figure, 1 is a U-shaped W frame, a spindle 2 is rotatably provided at one end of the frame 1, and an anvil 3 is fixedly provided at the other end of the frame 1 opposite to the spindle 2. has been done. A simple 5 is integrally fitted to one end of the spindle 2 extending outside the frame 1 via a fitting part 4, and a simple 5 is integrally fitted to the frame 1, extending between the spindle 2 and the simple 5. A sleeve 8 screwed onto the spindle 2 via a threaded portion 7 is fixed via a holding member 9. That is,
The spindle 2 can move forward and backward toward the anvil 3 following the rotational movement of the simple 5.

こ〜で、本マイクロメータは、スピンドル2の機械的な
変位量をエンコーダを用いて検出し、この検出量に応じ
た電気信号パルスを計数回路に入力し、該計数回路にて
前記エンコーダの出力する電気信号パルスを計数し、こ
の計数値をフレームlの側面に設けたデジタル表示器l
O上にデジタル表示する手段を備えている。
Here, this micrometer detects the amount of mechanical displacement of the spindle 2 using an encoder, inputs an electric signal pulse corresponding to this detected amount to a counting circuit, and uses the counting circuit to calculate the output of the encoder. A digital display l provided on the side of the frame l counts the electrical signal pulses generated by the frame l.
It is equipped with means for digital display on the O.

上記エンコーダは、スピンドル2に摺動自在に被嵌され
た保持筒11と、該保持筒11に嵌合固定された回転筒
12と、該回転筒12と一定間隔を有するようにフレー
ム1に固定された固定筒13とを有している。保持筒1
1はフレーム1に着座するばね14によって軸方向に付
勢されると共に、スピンドル2に設けたキー溝15に掛
合するピン1Bによってスピンドル2に対する回りが規
制されている。これにより、回転筒12はスピンドル2
の軸方向への移動を許容しつ〜該スピンドル2と一体に
回転することができる。そして図示を略すが、前記固定
筒13には送信電極と受信電極とが配設され、一方前記
回転筒12には前記両電極を静電結合する結合電極アー
ス電極とが配設されている。これにより、前記送信電極
に位相の異なる矩形波あるいは正弦波から成る交流電圧
を印加した状態で前記回転筒12を回転すれば、受信電
極から回転筒12の回転変位量に応じた位相の出力信号
を得ることができる。すなわち、受信電極から出力され
る信号の位相を所定の基準位相と比較することにより、
スピンドル2の変位量を測定できるようになっている。
The encoder includes a holding cylinder 11 slidably fitted onto the spindle 2, a rotating cylinder 12 fitted and fixed to the holding cylinder 11, and fixed to the frame 1 at a constant distance from the rotating cylinder 12. It has a fixed cylinder 13. Holding tube 1
1 is urged in the axial direction by a spring 14 seated on the frame 1, and its rotation with respect to the spindle 2 is restricted by a pin 1B that engages with a keyway 15 provided in the spindle 2. As a result, the rotating cylinder 12 is connected to the spindle 2.
It is possible to rotate integrally with the spindle 2 while allowing movement in the axial direction. Although not shown, the stationary tube 13 is provided with a transmitting electrode and a receiving electrode, while the rotating tube 12 is provided with a coupling electrode and a ground electrode for electrostatically coupling the two electrodes. As a result, if the rotary tube 12 is rotated while an alternating current voltage consisting of a rectangular wave or a sine wave with different phases is applied to the transmitting electrode, an output signal with a phase corresponding to the amount of rotational displacement of the rotary tube 12 is output from the receiving electrode. can be obtained. That is, by comparing the phase of the signal output from the receiving electrode with a predetermined reference phase,
The amount of displacement of the spindle 2 can be measured.

しかして、本実施例においては、前記スピンドル2とア
ンビル3のそれぞれの先端部2a、3aに、超硬質物質
から成る被覆層(斜線を付して表わす)を設けている。
Therefore, in this embodiment, a coating layer (indicated by diagonal lines) made of an ultra-hard material is provided on each of the tips 2a and 3a of the spindle 2 and anvil 3.

超硬質物質としては、元素周規律表のNa、Va、vI
a属金属又はSiの炭化物、窒化物若しくは炭窒化物、
あるいはダイヤモンド又は硬質炭素を適宜選択して良く
、例えばTie、 TiC、SiC、硬質炭素等を選択
することができる。また被覆層の形成は1例えばCVD
法、真空蒸着法、スパッタリング法、イオンブレーティ
ング法等、化学的および物理的な種々の技術を採用する
ことができる。
Ultra-hard substances include Na, Va, and vI in the periodic table of elements.
Carbide, nitride or carbonitride of group a metal or Si,
Alternatively, diamond or hard carbon may be selected as appropriate; for example, Tie, TiC, SiC, hard carbon, etc. can be selected. In addition, the coating layer can be formed by 1, for example, CVD.
Various chemical and physical techniques can be employed, such as the method, vacuum evaporation method, sputtering method, and ion blating method.

さらに該被覆層の膜厚は0.5〜20井コとすることが
望ましい、このように設けられた被覆層は、例えばTi
NでHマ2000程度、TiCでHマ3200程度、S
rCでHマ2500程度、ダイヤモンドでHマ1000
0程度の高硬さとなる。
Furthermore, it is desirable that the thickness of the coating layer be 0.5 to 20 μm.
N is about 2000 H, TiC is about 3200, S
Hma about 2500 with rC, Hma 1000 with diamond
The hardness is as high as 0.

かよる構成により、シンプル5を回し、スピンドル2を
進出させて該スピンドル2とアンビル3との間に被測定
物を挾持すれば、該スピンンドル2の変位量が電気的に
検出され、デジタル表示器10上にデジタル表示される
With this configuration, when the simple 5 is rotated, the spindle 2 is advanced, and the object to be measured is held between the spindle 2 and the anvil 3, the amount of displacement of the spindle 2 is detected electrically, and a digital display is displayed. digitally displayed on 10.

ところで、スピンドル2とアンビル3のそれぞれの先端
部2a、3aには超硬質物質から成る被覆層層が設けら
れており、その高い硬さと摩擦係数の低下によって、ス
ピンドル2とアンビル3との間に繰返し被測定物を挾持
しても、測定面が早期に摩耗することがなくなるばかり
か、耐食性の向上により測定面の腐蝕を防止し、摩耗の
原因となる腐蝕傷が早期に発生することがなくなる。こ
の結果、特に本実施例のごとき、デジタル表示機能を備
えた高グレードのマイクロメータにおいては、商品価格
に見合う耐久性を保証できて、その信頼性は著しく高い
ものとなる。
By the way, a coating layer made of an ultra-hard material is provided on the tips 2a and 3a of the spindle 2 and anvil 3, and due to its high hardness and low friction coefficient, there is a gap between the spindle 2 and anvil 3. Not only does the measurement surface not wear out prematurely even when the object to be measured is repeatedly held, but the improved corrosion resistance prevents corrosion on the measurement surface, eliminating the early occurrence of corrosion scratches that cause wear. . As a result, especially in a high-grade micrometer equipped with a digital display function, such as the one in this embodiment, durability commensurate with the product price can be guaranteed, and its reliability is extremely high.

なお、上記実施例において、スピンドル2及びアンビル
3の先端部2a、3aにのみ被N層を設けるようにした
が、これに代え、該被覆層をスピンドル2又はアンビル
3の端面のみ又は全体に設けて良いことはもちろんであ
る。特に全体に設けた場合、スピンドル2のねじ部7が
早期に損耗することがなくなり、より一層の耐久Φ信頼
性の向上を達成できるようになる。
Note that in the above embodiment, the N layer was provided only on the tip ends 2a and 3a of the spindle 2 and anvil 3, but instead of this, the coating layer could be provided only on the end surface of the spindle 2 or anvil 3, or on the entire end surface. Of course, this is a good thing. In particular, when provided throughout the entire body, the threaded portion 7 of the spindle 2 will not wear out prematurely, making it possible to achieve further improvement in durability and Φ reliability.

(発明の効果) 以上、詳細に説明したように、本発明にか覧るマイクロ
メータは、スピンドル及びアンビルの少なくとも測定面
に超硬質物質から成る被覆層を設けたので、該測定面が
早期に摩耗したり、該測定面に早期に凹凸や摩耗傷が発
生することがなくなって、耐久、信頼性が著しく向上す
る効果が得られた。
(Effects of the Invention) As explained above in detail, the micrometer according to the present invention is provided with a coating layer made of an ultra-hard material on at least the measurement surfaces of the spindle and anvil, so that the measurement surfaces can be quickly removed. There was no wear, and there was no early occurrence of unevenness or wear scratches on the measurement surface, resulting in the effect of significantly improving durability and reliability.

【図面の簡単な説明】[Brief explanation of the drawing]

図は、本発明にか\るマイクロメータの構造の一例を示
す断面図である。 2 … スピンドル 3 ・・・ アンビル
The figure is a sectional view showing an example of the structure of a micrometer according to the present invention. 2... Spindle 3... Anvil

Claims (1)

【特許請求の範囲】[Claims] (1)スピンドル及びアンビルの少なくとも測定面に、
元素周規律表のIVa、Va、VIa属金属、又はSiの炭
化物、窒化物若しくは炭窒化物、ダイヤモンド又は硬質
炭素から選ばれた少なくとも一種類の被覆層を一層又は
多層に設けたことを特徴とするマイクロメータ。
(1) At least on the measurement surface of the spindle and anvil,
It is characterized by being provided with a coating layer of at least one type selected from metals of groups IVa, Va, and VIa of the Periodic Table of the Elements, carbides, nitrides, or carbonitrides of Si, diamond, or hard carbon, in one layer or in multiple layers. micrometer.
JP20932186A 1986-09-05 1986-09-05 Micrometer Pending JPS6365064A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20932186A JPS6365064A (en) 1986-09-05 1986-09-05 Micrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20932186A JPS6365064A (en) 1986-09-05 1986-09-05 Micrometer

Publications (1)

Publication Number Publication Date
JPS6365064A true JPS6365064A (en) 1988-03-23

Family

ID=16571012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20932186A Pending JPS6365064A (en) 1986-09-05 1986-09-05 Micrometer

Country Status (1)

Country Link
JP (1) JPS6365064A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426657A (en) * 1977-07-30 1979-02-28 Sony Corp Cathode ray tube
JPS5457477A (en) * 1977-10-18 1979-05-09 Sumitomo Electric Ind Ltd Throw away tip of coated tool steel
JPS55161066A (en) * 1979-05-31 1980-12-15 Sumitomo Electric Ind Ltd Formation of covering film by ion plating
JPS56156767A (en) * 1980-05-02 1981-12-03 Sumitomo Electric Ind Ltd Highly hard substance covering material

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426657A (en) * 1977-07-30 1979-02-28 Sony Corp Cathode ray tube
JPS5457477A (en) * 1977-10-18 1979-05-09 Sumitomo Electric Ind Ltd Throw away tip of coated tool steel
JPS55161066A (en) * 1979-05-31 1980-12-15 Sumitomo Electric Ind Ltd Formation of covering film by ion plating
JPS56156767A (en) * 1980-05-02 1981-12-03 Sumitomo Electric Ind Ltd Highly hard substance covering material

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