JPS6364465U - - Google Patents

Info

Publication number

JPS6364465U

JPS6364465U JP1986158659U JP15865986U JPS6364465U JP S6364465 U JPS6364465 U JP S6364465U JP 1986158659 U JP1986158659 U JP 1986158659U JP 15865986 U JP15865986 U JP 15865986U JP S6364465 U JPS6364465 U JP S6364465U

Authority

JP

Japan

Prior art keywords

polishing plate

polishing

workpiece

main shaft

float

Prior art date

1986-10-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005498 polishing Methods 0.000 claims description 11
• 239000007788 liquid Substances 0.000 claims description 2
• 238000000034 method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 239000012530 fluid Substances 0.000 description 1
• 238000003754 machining Methods 0.000 description 1