JPS6363954A - Fluorescent x-ray analyzer - Google Patents
Fluorescent x-ray analyzerInfo
- Publication number
- JPS6363954A JPS6363954A JP20887986A JP20887986A JPS6363954A JP S6363954 A JPS6363954 A JP S6363954A JP 20887986 A JP20887986 A JP 20887986A JP 20887986 A JP20887986 A JP 20887986A JP S6363954 A JPS6363954 A JP S6363954A
- Authority
- JP
- Japan
- Prior art keywords
- specimen
- valve
- flow rate
- flow
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は蛍光Ｘ線分析装置の予備排気機構に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a preliminary exhaust mechanism for a fluorescent X-ray analyzer.
（従来技術）
・一般に蛍光Ｘ線分析装置においては、試料室と分光室
との間にシャッタを設け、試料室を予備排気した後にこ
のシャブタを開いて、更に所定の真空度まで本排気を行
うようにしており、試料室の予備排気は、試料室と真空
ポンプとの連結管に設けられているバルブを開（ことで
行っている。(Prior art) - In general, in a fluorescent X-ray analyzer, a shutter is installed between the sample chamber and the spectroscopic chamber, and after the sample chamber is preliminarily evacuated, this shutter is opened and the main evacuation is performed to a predetermined degree of vacuum. Preliminary evacuation of the sample chamber is performed by opening a valve installed in the connecting pipe between the sample chamber and the vacuum pump.
しかしこの方法は、試料室の容積が小さい上にバルブを
開いたＢ５占でのα空間の差が大きいために、試料室が
瞬間的に真空となり、粉体のプレス試料のように脆い試
料の場合には、その時の衝撃によって表面が破損し易く
、破損した試料が飛散して試料室やポンプの汚れとなり
、他の試料の分析に悪影響を及ぼすという欠点があった
。However, with this method, the volume of the sample chamber is small and the difference in α space at B5 when the valve is opened is large, so the sample chamber becomes vacuum instantaneously, and this method is difficult to handle for fragile samples such as pressed powder samples. In this case, the surface is easily damaged by the impact, and the damaged sample scatters and contaminates the sample chamber and pump, which has a negative effect on the analysis of other samples.
その対策として従来より、破損し易い試料の場合にはバ
ルブをできるだけゆっくり開くという方法が採られてい
るが、面倒である上に、真空度の差が大きいためにあま
り効果がなかった。Conventional countermeasures have been to open the valve as slowly as possible for samples that are easily damaged, but this is cumbersome and not very effective due to the large difference in the degree of vacuum.
（発明が解決しようとする問題点）
本発明は上記の問題点に鑑み、予備排気の際に脆い試料
を破損する虞れのない蛍光Ｘ線分析装置を提供すること
を目的とするものである。(Problems to be Solved by the Invention) In view of the above-mentioned problems, an object of the present invention is to provide a fluorescent X-ray analyzer that is free from the risk of damaging a fragile sample during preliminary evacuation. .
（問題点を解決するための手段）
上記の目的を達成するために、本発明による蛍光Ｘ線分
析装置は、試料室と真空ポンプを結ぶ連結管の中間部を
複数の流路に分岐させ、各流路にバルブを設けたもので
ある。゛
（作用）
上記の槽成によれば、複数のバルブを順次開いていくこ
とにより、予備排気開始時の瞬間的な圧力変化を小さく
し、試料の破損や飛散を防止することができる。(Means for Solving the Problems) In order to achieve the above object, the fluorescent X-ray analyzer according to the present invention branches the intermediate part of the connecting tube connecting the sample chamber and the vacuum pump into a plurality of channels, A valve is provided in each flow path. (Function) According to the above-mentioned tank configuration, by sequentially opening a plurality of valves, it is possible to reduce the instantaneous pressure change at the start of preliminary evacuation and prevent damage and scattering of the sample.
（実施例）
第１図は本発明装置の実施例を示したもので、装置本体
はｘ４１ａ管１１分光室２、試料室３よりなり、分光室
２と試料室３の境界にシャッタ４が設けられている。試
料室３と真空ポンプ５を結ぶ連結管６の中間部は２本の
流路６ａ及び６ｂに分岐し、一方の旅路６ａには流量の
小さいバルブ７ａか、他方の流路６ｂには流量の大きい
バルブ７ｂがそれぞれ設けられている。(Embodiment) Fig. 1 shows an embodiment of the device of the present invention.The main body of the device consists of an It is being The middle part of the connecting pipe 6 connecting the sample chamber 3 and the vacuum pump 5 branches into two flow paths 6a and 6b, and one path 6a has a valve 7a with a small flow rate, and the other path 6b has a valve 7a with a small flow rate. A large valve 7b is provided respectively.
本実施例ではバルブ７ａ、７ｂの操作を自動化しており
、８はあらかじめ定められた排気パターンに従って各バ
ルブ７ａ、７ｂを制御するための制御機構、９は硬い試
料あるいは脆い試料に対して排気パターンを選択するた
めの排気パターン選択機構、１０は真空度をモニタする
ためのビラニーゲージである。なお１１は分光室２と真
空ポンプ５とを連結する連結管である。In this embodiment, the operation of the valves 7a and 7b is automated, 8 is a control mechanism for controlling each valve 7a and 7b according to a predetermined exhaust pattern, and 9 is an exhaust pattern for hard or brittle samples. 10 is a Villany gauge for monitoring the degree of vacuum. Note that 11 is a connecting pipe that connects the spectroscopic chamber 2 and the vacuum pump 5.
使用の際には、まず試料室３に試料へがセットされたこ
とを確認した後、排気パターン選択機構９で試料へに合
った排気パターンを選択し、制御機構８をスタートさせ
ると、制御機構８では排気パターン選択機構９からの指
示信号及びビラニーゲージ１０による所定の真空度検出
信号によって各バルブ７ａ、７ｂを開閉制御し、予備排
気を行うしのである。When in use, first confirm that the sample is set in the sample chamber 3, then select an exhaust pattern suitable for the sample using the exhaust pattern selection mechanism 9, and start the control mechanism 8. 8, each valve 7a, 7b is controlled to open and close in response to an instruction signal from the exhaust pattern selection mechanism 9 and a predetermined degree of vacuum detection signal from the Villany gauge 10, thereby performing preliminary exhaust.
第２図は排気パターン例を示したもので、金属とかセラ
ミックのように丈夫な試料の場合には、（ａ）図に示す
ように、直ちに小流量バルブ７ａ及び大流量バルブ７ｂ
を開いて、ビラニーゲージｌＯからの信号により予備排
気を完了させる。また粉体試料の場合には、（ｂ）図に
示すように、まず小流量バルブ７ａを開き、真空度が一
定値に達するのを待って、更に大流量バルブ７ｂを開く
ことにより、必要最小限の時間で予備排気を完了させる
ものである。なお（ｂ）図において、実線は上述のよう
にバルブ７ａ、７ｂをオンオフ制御したものであるが、
破線で示したように単一バルブの開度を連続的に制御す
るようにしてもよい。FIG. 2 shows an example of the exhaust pattern. In the case of a durable sample such as metal or ceramic, as shown in FIG.
is opened, and the pre-evacuation is completed by the signal from the Villany gauge IO. In addition, in the case of a powder sample, as shown in figure (b), first open the small flow valve 7a, wait until the degree of vacuum reaches a certain value, and then open the large flow valve 7b to minimize the necessary amount. The preliminary exhaust is completed in a limited amount of time. In addition, in the figure (b), the solid line shows the on/off control of the valves 7a and 7b as described above.
The opening degree of a single valve may be continuously controlled as shown by the broken line.
（発明の効果）
上述のように本発明によれば、試料室と真空ポンプを結
ぶ連結管の中間部を複数の流路に分岐させ、各流路にバ
ルブを設けたものであるから、予備排気開始時の流量を
絞って、瞬間的な流量変化による試料の破損を防止する
ことができるという利点を有するものである。(Effects of the Invention) As described above, according to the present invention, the intermediate portion of the connecting pipe connecting the sample chamber and the vacuum pump is branched into a plurality of channels, and each channel is provided with a valve. This has the advantage that by restricting the flow rate at the start of evacuation, it is possible to prevent damage to the sample due to instantaneous flow rate changes.
第１図は本発明装置の一実施例を示す系統図、第２図（
ａ）（ｂ）は同上の動作説明図である。
Ａ・・・試料、ｌ・・・Ｘ線管、２・・・分光室、３・
・・試料室、４・・・シャブタ、５・・・真空ポンプ、
６・・・連結管、６３．６ｂ・・・流路、？ａ、７ｂ・
・・バルブ、８・・・制御機構、９・・・排気パターン
選択機構、１０・・・ビラニーゲージ。Figure 1 is a system diagram showing one embodiment of the device of the present invention, and Figure 2 (
a) and (b) are explanatory diagrams of the same operation. A...sample, l...X-ray tube, 2...spectroscopy chamber, 3.
...Sample chamber, 4...Shabuta, 5...Vacuum pump,
6... Connecting pipe, 63.6b... Channel, ? a, 7b・
... Valve, 8... Control mechanism, 9... Exhaust pattern selection mechanism, 10... Villany gauge.
Claims (1)
の流路に分岐させ、各流路にバルブを設けて成る蛍光Ｘ
線分析装置。(1) Fluorescent
Line analyzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20887986A JPS6363954A (en) | 1986-09-05 | 1986-09-05 | Fluorescent x-ray analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20887986A JPS6363954A (en) | 1986-09-05 | 1986-09-05 | Fluorescent x-ray analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6363954A true JPS6363954A (en) | 1988-03-22 |
Family
ID=16563626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20887986A Pending JPS6363954A (en) | 1986-09-05 | 1986-09-05 | Fluorescent x-ray analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6363954A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0684362U (en) * | 1993-05-12 | 1994-12-02 | 株式会社島津製作所 | X-ray fluorescence analyzer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5583143A (en) * | 1978-12-19 | 1980-06-23 | Jeol Ltd | Exhaust system for electron beam equipment |
-
1986
- 1986-09-05 JP JP20887986A patent/JPS6363954A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5583143A (en) * | 1978-12-19 | 1980-06-23 | Jeol Ltd | Exhaust system for electron beam equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0684362U (en) * | 1993-05-12 | 1994-12-02 | 株式会社島津製作所 | X-ray fluorescence analyzer |
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