JPS6363780U - - Google Patents

Info

Publication number
JPS6363780U
JPS6363780U JP15848586U JP15848586U JPS6363780U JP S6363780 U JPS6363780 U JP S6363780U JP 15848586 U JP15848586 U JP 15848586U JP 15848586 U JP15848586 U JP 15848586U JP S6363780 U JPS6363780 U JP S6363780U
Authority
JP
Japan
Prior art keywords
semiconductor device
probe
measuring device
contact
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15848586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15848586U priority Critical patent/JPS6363780U/ja
Publication of JPS6363780U publication Critical patent/JPS6363780U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15848586U 1986-10-15 1986-10-15 Pending JPS6363780U (US06312121-20011106-C00033.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15848586U JPS6363780U (US06312121-20011106-C00033.png) 1986-10-15 1986-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15848586U JPS6363780U (US06312121-20011106-C00033.png) 1986-10-15 1986-10-15

Publications (1)

Publication Number Publication Date
JPS6363780U true JPS6363780U (US06312121-20011106-C00033.png) 1988-04-27

Family

ID=31082021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15848586U Pending JPS6363780U (US06312121-20011106-C00033.png) 1986-10-15 1986-10-15

Country Status (1)

Country Link
JP (1) JPS6363780U (US06312121-20011106-C00033.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06124985A (ja) * 1992-10-13 1994-05-06 Tokyo Electron Yamanashi Kk プローブ装置及びプロービング方法
JPH08195423A (ja) * 1995-01-13 1996-07-30 Nec Corp 半導体測定方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06124985A (ja) * 1992-10-13 1994-05-06 Tokyo Electron Yamanashi Kk プローブ装置及びプロービング方法
JPH08195423A (ja) * 1995-01-13 1996-07-30 Nec Corp 半導体測定方法

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