JPS6363120U - - Google Patents

Info

Publication number
JPS6363120U
JPS6363120U JP15702786U JP15702786U JPS6363120U JP S6363120 U JPS6363120 U JP S6363120U JP 15702786 U JP15702786 U JP 15702786U JP 15702786 U JP15702786 U JP 15702786U JP S6363120 U JPS6363120 U JP S6363120U
Authority
JP
Japan
Prior art keywords
gas
reactant
rotary table
reactants
housed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15702786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15702786U priority Critical patent/JPS6363120U/ja
Publication of JPS6363120U publication Critical patent/JPS6363120U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP15702786U 1986-10-13 1986-10-13 Pending JPS6363120U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15702786U JPS6363120U (US20030199744A1-20031023-C00003.png) 1986-10-13 1986-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15702786U JPS6363120U (US20030199744A1-20031023-C00003.png) 1986-10-13 1986-10-13

Publications (1)

Publication Number Publication Date
JPS6363120U true JPS6363120U (US20030199744A1-20031023-C00003.png) 1988-04-26

Family

ID=31079193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15702786U Pending JPS6363120U (US20030199744A1-20031023-C00003.png) 1986-10-13 1986-10-13

Country Status (1)

Country Link
JP (1) JPS6363120U (US20030199744A1-20031023-C00003.png)

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