JPS6362817A - 真空熱処理方法 - Google Patents
真空熱処理方法Info
- Publication number
- JPS6362817A JPS6362817A JP20593386A JP20593386A JPS6362817A JP S6362817 A JPS6362817 A JP S6362817A JP 20593386 A JP20593386 A JP 20593386A JP 20593386 A JP20593386 A JP 20593386A JP S6362817 A JPS6362817 A JP S6362817A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- vacuum
- workpiece
- gas
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009489 vacuum treatment Methods 0.000 title abstract 4
- 239000007789 gas Substances 0.000 claims abstract description 22
- 239000012159 carrier gas Substances 0.000 claims abstract description 9
- 238000010438 heat treatment Methods 0.000 claims abstract description 8
- 239000011261 inert gas Substances 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 2
- 238000011109 contamination Methods 0.000 abstract description 8
- 238000011282 treatment Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 206010011224 Cough Diseases 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/008—Soldering within a furnace
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Powder Metallurgy (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20593386A JPS6362817A (ja) | 1986-09-03 | 1986-09-03 | 真空熱処理方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20593386A JPS6362817A (ja) | 1986-09-03 | 1986-09-03 | 真空熱処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6362817A true JPS6362817A (ja) | 1988-03-19 |
JPH0577724B2 JPH0577724B2 (enrdf_load_stackoverflow) | 1993-10-27 |
Family
ID=16515136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20593386A Granted JPS6362817A (ja) | 1986-09-03 | 1986-09-03 | 真空熱処理方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6362817A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03130317A (ja) * | 1989-06-29 | 1991-06-04 | Ulvac Japan Ltd | 多室型真空熱処理炉を構成する各室の清浄度維持方法 |
-
1986
- 1986-09-03 JP JP20593386A patent/JPS6362817A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03130317A (ja) * | 1989-06-29 | 1991-06-04 | Ulvac Japan Ltd | 多室型真空熱処理炉を構成する各室の清浄度維持方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0577724B2 (enrdf_load_stackoverflow) | 1993-10-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2002082523A1 (en) | Heat treating method and heat treating device | |
KR0181176B1 (ko) | 진공하에서의 연속 열처리 수행장치 | |
JPS6144947B2 (enrdf_load_stackoverflow) | ||
JPS6362817A (ja) | 真空熱処理方法 | |
JPH111759A (ja) | ガス浸炭方法及びその装置 | |
JPH0210721A (ja) | 半導体製造装置 | |
JPH03130317A (ja) | 多室型真空熱処理炉を構成する各室の清浄度維持方法 | |
JPS5792127A (en) | Continuous bright heat treatment of metal in furnace containing gaseous atmosphere | |
JPH06248329A (ja) | 焼入油槽室を有する熱処理装置 | |
JPS60141822A (ja) | 真空ベスチブルを備えた雰囲気熱処理炉 | |
JPH0434399Y2 (enrdf_load_stackoverflow) | ||
JPS63307273A (ja) | 基板に薄層をスパツタする装置 | |
JP2696920B2 (ja) | 雰囲気処理装置 | |
JP2005050852A (ja) | 負圧処理装置のロードロック室パージシステム及びその方法 | |
JPH0324274A (ja) | 気相成長装置 | |
JPH08139041A (ja) | 減圧処理装置のガス給排装置及びガス導入方法 | |
JPH0573492U (ja) | 熱処理炉 | |
JPH032372A (ja) | 被処理物の処理方法および処理装置 | |
JPH04141506A (ja) | 真空焼結炉 | |
JPH07238363A (ja) | ガス軟窒化処理方法および装置 | |
JPS60115227A (ja) | プラズマ等の処理方法とその装置 | |
JPH04107222A (ja) | コイル状被処理材の焼鈍方法及び熱処理炉 | |
JPH0232531A (ja) | 半導体製造装置 | |
JPH04180233A (ja) | 熱処理装置 | |
JPH05206063A (ja) | 積層配線形成用スパッタ装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |