JPS6361152A - Laser beam inspecting method - Google Patents

Laser beam inspecting method

Info

Publication number
JPS6361152A
JPS6361152A JP20619186A JP20619186A JPS6361152A JP S6361152 A JPS6361152 A JP S6361152A JP 20619186 A JP20619186 A JP 20619186A JP 20619186 A JP20619186 A JP 20619186A JP S6361152 A JPS6361152 A JP S6361152A
Authority
JP
Japan
Prior art keywords
laser beam
inspected
mirror surface
mirror
scanning means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20619186A
Other languages
Japanese (ja)
Inventor
Mitsuhiro Tomikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP20619186A priority Critical patent/JPS6361152A/en
Publication of JPS6361152A publication Critical patent/JPS6361152A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Abstract

PURPOSE:To perform highly accurate inspection by making the angle of laser beam allowed to irradiate an object to be inspected constant, by radially emitting laser beam from the specific point of the focus of an optical means by an angular scanning means to investigate the surface characteristic distribution of the object to be inspected. CONSTITUTION:Laser beam 1 is guided to the vibration mirror 4 of an angular scanning means through a mirror 2 and a lens 3 and the mirror surface 4a of said vibration mirror 4 at the specific point thereof is set so as to match with the focal position of the parabolic mirror surface 6 of an optical means. Then, the laser beam is guided to the parabolic mirror surface 6 by the mirror surface 4a to be converted to parallel laser beam by the parabolic mirror surface and allowed to advance to a reflecting mirror 7 to be reflected therefrom to irradiate an object 5 to be inspected at a definite angle. Since the angular scanning means is set at the specific position of the focus of the parabolic mirror surface and the laser beam is set in a definite direction to scan the object to be inspected, the effect due to the angular change of the laser beam is excluded and the surface characteristic distribution of the object to be inspected can be measured accurately.
JP20619186A 1986-09-01 1986-09-01 Laser beam inspecting method Pending JPS6361152A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20619186A JPS6361152A (en) 1986-09-01 1986-09-01 Laser beam inspecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20619186A JPS6361152A (en) 1986-09-01 1986-09-01 Laser beam inspecting method

Publications (1)

Publication Number Publication Date
JPS6361152A true JPS6361152A (en) 1988-03-17

Family

ID=16519314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20619186A Pending JPS6361152A (en) 1986-09-01 1986-09-01 Laser beam inspecting method

Country Status (1)

Country Link
JP (1) JPS6361152A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5343290A (en) * 1992-06-11 1994-08-30 International Business Machines Corporation Surface particle detection using heterodyne interferometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5343290A (en) * 1992-06-11 1994-08-30 International Business Machines Corporation Surface particle detection using heterodyne interferometer

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