JPS635902B2 - - Google Patents
Info
- Publication number
- JPS635902B2 JPS635902B2 JP53156119A JP15611978A JPS635902B2 JP S635902 B2 JPS635902 B2 JP S635902B2 JP 53156119 A JP53156119 A JP 53156119A JP 15611978 A JP15611978 A JP 15611978A JP S635902 B2 JPS635902 B2 JP S635902B2
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- wiring
- contact
- cell
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 12
- 238000009792 diffusion process Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000010354 integration Effects 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000872 buffer Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15611978A JPS5582449A (en) | 1978-12-15 | 1978-12-15 | Cell of master slice semiconductor integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15611978A JPS5582449A (en) | 1978-12-15 | 1978-12-15 | Cell of master slice semiconductor integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5582449A JPS5582449A (en) | 1980-06-21 |
| JPS635902B2 true JPS635902B2 (cs) | 1988-02-05 |
Family
ID=15620727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15611978A Granted JPS5582449A (en) | 1978-12-15 | 1978-12-15 | Cell of master slice semiconductor integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5582449A (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5858741A (ja) * | 1981-10-05 | 1983-04-07 | Nec Corp | 集積回路装置 |
| JPS63296240A (ja) * | 1988-04-22 | 1988-12-02 | Nec Corp | 半導体集積回路装置 |
-
1978
- 1978-12-15 JP JP15611978A patent/JPS5582449A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5582449A (en) | 1980-06-21 |
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