JPS6357734A - Fiber reinforced metal and its production - Google Patents
Fiber reinforced metal and its productionInfo
- Publication number
- JPS6357734A JPS6357734A JP20005286A JP20005286A JPS6357734A JP S6357734 A JPS6357734 A JP S6357734A JP 20005286 A JP20005286 A JP 20005286A JP 20005286 A JP20005286 A JP 20005286A JP S6357734 A JPS6357734 A JP S6357734A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- whiskers
- fiber
- reinforced metal
- mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 41
- 239000002184 metal Substances 0.000 title claims abstract description 41
- 239000000835 fiber Substances 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000919 ceramic Substances 0.000 claims abstract description 28
- 239000000843 powder Substances 0.000 claims abstract description 18
- 239000011159 matrix material Substances 0.000 claims abstract description 13
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- 238000005245 sintering Methods 0.000 claims abstract description 3
- 239000012783 reinforcing fiber Substances 0.000 claims description 10
- 239000011812 mixed powder Substances 0.000 claims description 9
- 238000003825 pressing Methods 0.000 claims description 2
- 239000000203 mixture Substances 0.000 abstract description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- 230000003628 erosive effect Effects 0.000 abstract description 4
- 229910002804 graphite Inorganic materials 0.000 abstract description 4
- 239000010439 graphite Substances 0.000 abstract description 4
- 239000000956 alloy Substances 0.000 abstract description 2
- 229910045601 alloy Inorganic materials 0.000 abstract description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 239000002904 solvent Substances 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 description 11
- 238000005299 abrasion Methods 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000006210 lotion Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910018540 Si C Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052789 astatine Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- NJLLQSBAHIKGKF-UHFFFAOYSA-N dipotassium dioxido(oxo)titanium Chemical compound [K+].[K+].[O-][Ti]([O-])=O NJLLQSBAHIKGKF-UHFFFAOYSA-N 0.000 description 1
- 238000007542 hardness measurement Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- WHOPEPSOPUIRQQ-UHFFFAOYSA-N oxoaluminum Chemical compound O1[Al]O[Al]1 WHOPEPSOPUIRQQ-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、セラミックスウィスカとセラミックス連続ｍ
ａとを同時に強化繊維として用いた、高強度、耐摩耗性
、耐熱性、耐二ローション性を向上させた繊維強化金属
およびその製造法に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention provides ceramic whiskers and ceramic continuous m
The present invention relates to a fiber-reinforced metal with improved high strength, abrasion resistance, heat resistance, and lotion resistance, and a method for producing the same, using A as a reinforcing fiber at the same time.
〔従来の技術］
従来、繊維強化金属は、セラミックスウィスカ又はセラ
ミックス連続繊維をそれぞれ単独に強化繊維として用い
ていた。[Prior Art] Conventionally, fiber-reinforced metals have used ceramic whiskers or ceramic continuous fibers as reinforcing fibers.
セラミックスウィスカを強化繊維とする繊維強化金属は
、強化繊維のセラミックスウィスカが、繊維径；１１μ
ＩＩＩ −％−ｔ ０μｍ１繊維長さ；３０μｍ〜２０
０μｍと非常に微細であるため、マ） ＩＪツクス金属
内に均一に分布し、耐摩耗性や摺動特性は非常に優れて
いる。しかし、高強度、耐熱性及び信頼性の面では、繊
維が非常に微細であるため、繊維の持っている優れた特
性が発揮されず、十分なものが得られていない。The fiber reinforced metal using ceramic whiskers as reinforcing fibers has a fiber diameter of 11 μm.
III -%-t 0 μm 1 fiber length; 30 μm ~ 20
Since it is very fine (0 μm), it is uniformly distributed within the IJTx metal, and has excellent wear resistance and sliding properties. However, in terms of high strength, heat resistance, and reliability, since the fibers are very fine, the excellent properties of the fibers cannot be exhibited, and satisfactory results have not been obtained.
一方、セラミックス連続繊維を強化繊維とする繊維強化
金属は、引張強度、耐熱性等においては、マトリックス
金属と比較すると２〜３倍の優れた特性を示す。しかし
、耐エロージヨン性、耐摩耗性等圧ついては、ウィスカ
強化金属と比較すると劣っている。On the other hand, fiber-reinforced metals using ceramic continuous fibers as reinforcing fibers exhibit properties that are two to three times better than matrix metals in terms of tensile strength, heat resistance, and the like. However, it is inferior to whisker-reinforced metals in terms of erosion resistance and wear resistance.
本発明は、高強度、耐熱性、耐摩耗性、耐工ローション
性等の特性？すべて兼ね備えた繊維強化金属およびその
製法を提供することを目的とする。The present invention has characteristics such as high strength, heat resistance, abrasion resistance, and lotion resistance. The purpose is to provide fiber-reinforced metals that have all the necessary features and a method for producing the same.
本発明は、強化繊維としてセラミックスウィスカトセラ
ミックス連続繊維とを同時に用いたことを特徴とする繊
維強化金属に関する。The present invention relates to a fiber-reinforced metal characterized in that ceramic whisker and ceramic continuous fibers are simultaneously used as reinforcing fibers.
また、本発明は、セラミックスウィスカとマトリックス
金属粉末との混合粉末と、セラミックス連続繊維を交互
に積層し、加圧しながら加熱焼結して繊維強化金属を製
造することを特徴とする繊維強化金属の製造法例関する
。The present invention also provides a fiber-reinforced metal characterized in that a mixed powder of ceramic whiskers and matrix metal powder and ceramic continuous fibers are alternately laminated and heated and sintered under pressure to produce a fiber-reinforced metal. Regarding manufacturing method examples.
本発明において、セラミックスウィスカとじては、Ｓｉ
Ｃ，Ｓｉ３Ｎ４． Ａｌ５ｏ、、 チタン酸カリウ
ム等のウィスカが使用でき、またセラミックス連続ｆｆ
ｌ＃ａとしては、Ａｌ２Ｏ２、８１０、Ｚｒ＠Ｏｓ。In the present invention, the ceramic whisker is Si
C, Si3N4. Whiskers such as Al5o, potassium titanate, etc. can be used, and ceramic continuous ff
l#a is Al2O2, 810, Zr@Os.
ＢＮ 、 ｃ 、 Ｂ／Ｗ 、 ｓｉｃ／ｗ等の
連続繊維が使用でき、マトリックス金属粉末としてはＮ
ｉ、Ｏｒ。Continuous fibers such as BN, C, B/W, SIC/W can be used, and N as the matrix metal powder.
i, Or.
Ｇｏ 、 Ａｔ、 Ｃｕ、 Ｔｉ等の純金属、これらの
金属を主成分とする合金が使用できる。Pure metals such as Go, At, Cu, and Ti, and alloys containing these metals as main components can be used.
本発明において、セラミックス連続繊維が４０ ｖｏｌ
％以下、セラミックスウィスカが５〜３０ ｖｏｌ
％、残りがマトリックス金属粉となるように使用するこ
とが、繊維強化の効果を十分なものとし、マトリックス
金属とウィスカと連続繊維の密着性を向上させて、延性
のすぐれた繊維強化金属とすることができて好適である
。In the present invention, the ceramic continuous fiber has a volume of 40 vol.
% or less, ceramic whisker is 5 to 30 vol
%, and the remainder is used as matrix metal powder to achieve a sufficient fiber-reinforcing effect, improve the adhesion between the matrix metal, whiskers, and continuous fibers, and create a fiber-reinforced metal with excellent ductility. It is suitable because it can be done.
また、本発明において、セラミックスウィスカとマトリ
ックス金属粉末との混合粉末と、セラミックス連続繊維
を交互に積Ｊ脅し、加圧しながら加熱焼結するが、この
時の加圧力は高い程好ましく、少くとも２００ ｋｇ／
ｃｙｍ”とすることが望ましい。また、加熱焼結温度は
、マトリックス金属の融点〜融点Ｘ％とすることが好ま
しい。In addition, in the present invention, a mixed powder of ceramic whiskers and matrix metal powder and ceramic continuous fibers are alternately laminated and heated and sintered under pressure. kg/
The heating sintering temperature is preferably from the melting point of the matrix metal to X% of the melting point.
融点を越えると、マトリックス金属粉末が溶けて後述す
る黒鉛型の隙間から流れ出し、また温度が高くなればウ
ィスカや連続繊維とマトリックス金属との反応が活発と
なり好ましくなく、逆に金属の融点Ｘ％以下では、低温
すぎて完全な焼結体が得られないおそれがあるからであ
る。If the melting point is exceeded, the matrix metal powder will melt and flow out from the gaps in the graphite mold described below, and if the temperature becomes high, the reaction between whiskers and continuous fibers and the matrix metal will become active, which is undesirable. This is because the temperature is too low and a complete sintered body may not be obtained.
セラミックスウィスカは繊維径が０１μｍ〜１．０μｍ
、繊維長さが２０μｍ〜２００μｍと非常に微細である
ため、繊維強化金属用の強化繊維として用いると、マト
リックス金属中に均一に分布し、かｔ摩耗性、耐二ロー
ション性が著しく向上することが期待できる。Ceramic whiskers have a fiber diameter of 01 μm to 1.0 μm.
Since the fiber length is very fine with a length of 20 μm to 200 μm, when used as reinforcing fibers for fiber-reinforced metals, they are uniformly distributed in the matrix metal, and the abrasion resistance and lotion resistance are significantly improved. can be expected.
セラミックス連続繊維を強化繊維として用いた繊維強化
金属は、引張強度、耐熱性、疲労特性等がマトリックス
金属と比較して著しく優れている。Fiber-reinforced metals using ceramic continuous fibers as reinforcing fibers are significantly superior in tensile strength, heat resistance, fatigue properties, etc. compared to matrix metals.
従って、上記セラミックスウィスカとセラミックス連続
繊維とを、同時に強化繊維として用いる本発明では、両
者の特性を兼ね備えた高強度、耐摩耗性、耐熱性、耐エ
ロージヨン性、疲労特性等の優れた繊維強化金属（ＦＲ
Ｍ ）を得ることができる。Therefore, in the present invention, which uses the ceramic whiskers and ceramic continuous fibers as reinforcing fibers at the same time, a fiber-reinforced metal with excellent strength, abrasion resistance, heat resistance, erosion resistance, fatigue properties, etc., which has both characteristics. (FR
M) can be obtained.
実施例１
粒径５μｍのＮｉ粉末に、ＳｉＣウィスカをＮ１粉末に
対して１５ ｖｏ１％加え、これに有機溶媒（トリクロ
ロエタン）を添加して、３０分間混練し、十分に乾燥さ
せ、Ｎ１ 粉末とｓｉｃウィスカの混合粉末を得た。Example 1 SiC whiskers were added to Ni powder with a particle size of 5 μm at 15 vol% based on the N1 powder, an organic solvent (trichloroethane) was added thereto, the mixture was kneaded for 30 minutes, thoroughly dried, and the N1 powder and SiC whiskers were added. A mixed powder of whiskers was obtained.
次に、第１図に示すように、内径６０ｗｍ、高さ１５０
鱈の黒鉛型外筒２に、上記混合粉末３と、８１０連続繊
維４とを交互に各２０層づつ配した。なお、混合粉末３
の一層の重量は１０Ｆとした。Next, as shown in Figure 1, the inner diameter is 60 wm and the height is 150 mm.
The above-mentioned mixed powder 3 and 810 continuous fibers 4 were alternately arranged in 20 layers each in a cod graphite-shaped outer cylinder 2. In addition, mixed powder 3
The weight of one layer was 10F.
さらに、この黒鉛型外筒２をホットプレス装置６内に配
し真空吸引後、パンチ棒１を介して２００ ）ｃｙ／ｃ
ＨＩ怠の圧力で加圧したまま、１０００℃にヒータ５で
加熱し、２時間保持した。Further, this graphite mold outer cylinder 2 is placed in a hot press device 6, and after vacuum suction, a punch of 200 ) cy/c is applied via a punch rod 1.
While pressurized at the HI pressure, it was heated to 1000° C. with the heater 5 and held for 2 hours.
以上の工程で、直径φ６０頷、厚さ１０鱈のＢ１０ウィ
スカ及び８１０連続繊維の両者で強化された繊維強化金
属を得た。Through the above steps, a fiber-reinforced metal reinforced with both B10 whiskers and 810 continuous fibers with a diameter of 60 mm and a thickness of 10 mm was obtained.
この繊維強化金属について、硬度の改善状況をビッカー
ス硬さにより測定した結果、以下の通りとなった。Regarding this fiber-reinforced metal, the hardness improvement status was measured by Vickers hardness, and the results were as follows.
表 １
費 １１１（母材）は、比較のために純Ｍ１についての
ビッカース硬さを測定したものである。Table 1 111 (base material) shows the measured Vickers hardness of pure M1 for comparison.
畳畳 ビッカース硬さけ、５回測定し、その結果を示し
たものである。Tatami tatami Vickers hardness was measured 5 times and the results are shown.
実施例２
粒径の平均が５０μｍのＯｕ粉末に、ＳｉＯウィスカを
Ｃｕ 粉末に対して１０ ｖｏｗ ％加え、これに有機
溶媒（トリクロロエタン）を添加して、３０分間混練し
十分に乾燥させ、ｃｕ 粉末とＳｉＯウィスカの混合粉
末を得た。Example 2 SiO whiskers were added to Ou powder with an average particle size of 50 μm in an amount of 10 vol % based on Cu powder, an organic solvent (trichloroethane) was added thereto, and the mixture was kneaded for 30 minutes and thoroughly dried to form Cu powder. A mixed powder of SiO and SiO whiskers was obtained.
この混合粉末を、実施例１と同じ要領で、ｓｉｃ連続繊
維と交互に各１５層づつ黒鉛型内に配し、ホットプレス
装置にセットして、真空吸引、加熱及び加圧の工程を行
なった。This mixed powder was placed in a graphite mold in 15 layers each alternately with SIC continuous fibers in the same manner as in Example 1, set in a hot press device, and subjected to the steps of vacuum suction, heating, and pressurization. .
々お、混合粉末の一層の重量Ｆｉ５Ｆとし、加圧力Ｆｉ
５００ ｋ（ｉ／澤：、加熱温度は８５０℃とした。Let the weight of one layer of mixed powder be Fi5F, and the pressing force Fi
The heating temperature was 500 k(i/sawa: 850°C).
以上の工程で直径φ６０鱈、厚さ８■のＳｉＯウィスカ
及び８１０連続繊維の両者で強化された繊維強化金属を
得た。Through the above steps, a fiber-reinforced metal having a diameter of φ60 and a thickness of 8 cm reinforced with both SiO whiskers and 810 continuous fibers was obtained.
このｌ！！！維強化全強化金属て、ビッカース硬さ測定
全実施した結果、以下の通りとなった。This l! ! ! The results of Vickers hardness measurements of all fiber-reinforced metals were as follows.
表 ２ 畳、■は表１と同じである。Table 2 Tatami, ■ is the same as Table 1.
本発明による績維強化金属は、セラミックスウィスカと
セラミックス連続繊維との両者を同時に強化繊維として
用いているため、高強度、耐熱性、耐摩耗性、耐エロー
ジヨン性、疲労特性等の緒特性の大巾々向上を得ること
ができる。Since the fiber-reinforced metal according to the present invention uses both ceramic whiskers and ceramic continuous fibers as reinforcing fibers, it has excellent properties such as high strength, heat resistance, abrasion resistance, erosion resistance, and fatigue properties. You can get a lot of improvement.
第１図は、本発明に係る一実施例の繊維強化金属の製造
工程を示す。
復代理人 内 １） 明
復代理人 荻 原 亮 −
復代理人 安 西 篤 夫
第１図FIG. 1 shows a manufacturing process of a fiber-reinforced metal according to an embodiment of the present invention. Sub-Agents 1) Meifuku Agent Ryo Ogihara - Sub-Agent Atsuo Anzai Figure 1
Claims (2)
クス連続繊維とを同時に用いたことを特徴とする繊維強
化金属。(1) A fiber-reinforced metal characterized by simultaneously using ceramic whiskers and ceramic continuous fibers as reinforcing fibers.
の混合粉末と、セラミックス連続繊維を交互に積層し、
加圧しながら加熱焼結して繊維強化金属を製造すること
を特徴とする繊維強化金属の製造法。(2) Alternately layering a mixed powder of ceramic whiskers and matrix metal powder and ceramic continuous fibers,
A method for producing a fiber-reinforced metal characterized by producing the fiber-reinforced metal by heating and sintering while applying pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20005286A JPS6357734A (en) | 1986-08-28 | 1986-08-28 | Fiber reinforced metal and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20005286A JPS6357734A (en) | 1986-08-28 | 1986-08-28 | Fiber reinforced metal and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6357734A true JPS6357734A (en) | 1988-03-12 |
Family
ID=16418027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20005286A Pending JPS6357734A (en) | 1986-08-28 | 1986-08-28 | Fiber reinforced metal and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6357734A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63216936A (en) * | 1987-03-04 | 1988-09-09 | Toshiba Corp | Manufacture of metal-base composite material |
| US6446353B2 (en) | 1990-08-29 | 2002-09-10 | Hitachi, Ltd. | Vacuum processing apparatus |
| US6714832B1 (en) | 1996-09-11 | 2004-03-30 | Hitachi, Ltd. | Operating method of vacuum processing system and vacuum processing system |
| JP2005089807A (en) * | 2003-09-16 | 2005-04-07 | Univ Nihon | Fiber reinforced composite material comprising metal reinforced fiber and titanium or titanium alloy, and its manufacturing method by spark plasma sintering (sps) method |
| USRE39775E1 (en) | 1990-08-29 | 2007-08-21 | Hitachi, Ltd. | Vacuum processing operating method with wafers, substrates and/or semiconductors |
-
1986
- 1986-08-28 JP JP20005286A patent/JPS6357734A/en active Pending
Cited By (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63216936A (en) * | 1987-03-04 | 1988-09-09 | Toshiba Corp | Manufacture of metal-base composite material |
| US6588121B2 (en) | 1990-08-29 | 2003-07-08 | Hitachi, Ltd. | Vacuum processing apparatus |
| US7367135B2 (en) | 1990-08-29 | 2008-05-06 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
| US6505415B2 (en) | 1990-08-29 | 2003-01-14 | Hitachi, Ltd. | Vacuum processing apparatus |
| US6463678B2 (en) | 1990-08-29 | 2002-10-15 | Hitachi, Ltd. | Substrate changing-over mechanism in a vaccum tank |
| US6467186B2 (en) | 1990-08-29 | 2002-10-22 | Hitachi, Ltd. | Transferring device for a vacuum processing apparatus and operating method therefor |
| US6467187B2 (en) | 1990-08-29 | 2002-10-22 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
| US6470596B2 (en) | 1990-08-29 | 2002-10-29 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
| US6473989B2 (en) | 1990-08-29 | 2002-11-05 | Hitachi, Ltd. | Conveying system for a vacuum processing apparatus |
| US6484415B2 (en) | 1990-08-29 | 2002-11-26 | Hitachi, Ltd. | Vacuum processing apparatus |
| US6487791B2 (en) | 1990-08-29 | 2002-12-03 | Hitachi, Ltd. | Vacuum processing apparatus |
| US6487794B2 (en) | 1990-08-29 | 2002-12-03 | Hitachi, Ltd. | Substrate changing-over mechanism in vacuum tank |
| US6499229B2 (en) | 1990-08-29 | 2002-12-31 | Hitachi, Ltd. | Vacuum processing apparatus |
| US6460270B2 (en) | 1990-08-29 | 2002-10-08 | Hitachi, Ltd. | Vacuum processing apparatus |
| US6457253B2 (en) | 1990-08-29 | 2002-10-01 | Hitachi, Ltd. | Vacuum processing apparatus |
| US6904699B2 (en) | 1990-08-29 | 2005-06-14 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
| US6446353B2 (en) | 1990-08-29 | 2002-09-10 | Hitachi, Ltd. | Vacuum processing apparatus |
| USRE39824E1 (en) | 1990-08-29 | 2007-09-11 | Hitachi, Ltd. | Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors |
| USRE39775E1 (en) | 1990-08-29 | 2007-08-21 | Hitachi, Ltd. | Vacuum processing operating method with wafers, substrates and/or semiconductors |
| US6880264B2 (en) | 1990-08-29 | 2005-04-19 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
| US6968630B2 (en) | 1990-08-29 | 2005-11-29 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
| US6886272B2 (en) | 1990-08-29 | 2005-05-03 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
| US6655044B2 (en) | 1990-08-29 | 2003-12-02 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
| US6941185B2 (en) | 1996-09-11 | 2005-09-06 | Hitachi, Ltd. | Operating method of vacuum processing system and vacuum processing system |
| US6885906B2 (en) | 1996-09-11 | 2005-04-26 | Hitachi, Ltd. | Operating method of vacuum processing system and vacuum processing system |
| US6853872B2 (en) | 1996-09-11 | 2005-02-08 | Hitachi, Ltd. | Operating method of vacuum processing system and vacuum processing system |
| US6714832B1 (en) | 1996-09-11 | 2004-03-30 | Hitachi, Ltd. | Operating method of vacuum processing system and vacuum processing system |
| JP2005089807A (en) * | 2003-09-16 | 2005-04-07 | Univ Nihon | Fiber reinforced composite material comprising metal reinforced fiber and titanium or titanium alloy, and its manufacturing method by spark plasma sintering (sps) method |
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