JPS6356555U - - Google Patents

Info

Publication number
JPS6356555U
JPS6356555U JP15136786U JP15136786U JPS6356555U JP S6356555 U JPS6356555 U JP S6356555U JP 15136786 U JP15136786 U JP 15136786U JP 15136786 U JP15136786 U JP 15136786U JP S6356555 U JPS6356555 U JP S6356555U
Authority
JP
Japan
Prior art keywords
electron microscope
scanning electron
test piece
observation area
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15136786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15136786U priority Critical patent/JPS6356555U/ja
Publication of JPS6356555U publication Critical patent/JPS6356555U/ja
Pending legal-status Critical Current

Links

JP15136786U 1986-09-30 1986-09-30 Pending JPS6356555U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15136786U JPS6356555U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-30 1986-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15136786U JPS6356555U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-30 1986-09-30

Publications (1)

Publication Number Publication Date
JPS6356555U true JPS6356555U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-15

Family

ID=31068377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15136786U Pending JPS6356555U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-30 1986-09-30

Country Status (1)

Country Link
JP (1) JPS6356555U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58201239A (ja) * 1982-05-20 1983-11-24 Mitsubishi Heavy Ind Ltd 試験片表面観察装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58201239A (ja) * 1982-05-20 1983-11-24 Mitsubishi Heavy Ind Ltd 試験片表面観察装置

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