JPS635631U - - Google Patents

Info

Publication number

JPS635631U

JPS635631U JP9772186U JP9772186U JPS635631U JP S635631 U JPS635631 U JP S635631U JP 9772186 U JP9772186 U JP 9772186U JP 9772186 U JP9772186 U JP 9772186U JP S635631 U JPS635631 U JP S635631U

Authority

JP

Japan

Prior art keywords

dry etching

measuring device

groove depth

etching apparatus

sample

Prior art date

1986-06-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001312 dry etching Methods 0.000 claims description 5
• 238000005530 etching Methods 0.000 claims description 3
• 238000005259 measurement Methods 0.000 claims description 3
• 238000000034 method Methods 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 1