JPS6355531U - - Google Patents

Info

Publication number

JPS6355531U

JPS6355531U JP14785186U JP14785186U JPS6355531U JP S6355531 U JPS6355531 U JP S6355531U JP 14785186 U JP14785186 U JP 14785186U JP 14785186 U JP14785186 U JP 14785186U JP S6355531 U JPS6355531 U JP S6355531U

Authority

JP

Japan

Prior art keywords

entrance

reaction chamber

lid

fork

hole

Prior art date

1986-09-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 3
• 235000012431 wafers Nutrition 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 2
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1

Cited By (1)