JPS6355426U - - Google Patents

Info

Publication number

JPS6355426U

JPS6355426U JP14770586U JP14770586U JPS6355426U JP S6355426 U JPS6355426 U JP S6355426U JP 14770586 U JP14770586 U JP 14770586U JP 14770586 U JP14770586 U JP 14770586U JP S6355426 U JPS6355426 U JP S6355426U

Authority

JP

Japan

Prior art keywords

molecular beam

beam source

heater

heating

vapor deposition

Prior art date

1986-09-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims 1
• 238000001451 molecular beam epitaxy Methods 0.000 claims 1
• 238000007740 vapor deposition Methods 0.000 claims 1
• 230000005855 radiation Effects 0.000 description 1