JPS6354789A - Gas laser - Google Patents

Abstract

PURPOSE:To prevent laser gas from being heated thereby to perform a discharge of high gain over a wide discharging space by injecting gas not heated by the discharge from the intermediate of the discharging area. CONSTITUTION:The optical axes of laser beams 16, 17, the flowing direction of laser gas 1, and the direction of a discharging path are generally perpendicularly crossed to each other, cathodes 4, 5 divided into a plurality are arranged at least in two or more rows at upstream and downstream sides of the gas 1, and the gas fed to the discharger of the cathode row 5 of the downstream side is combined by the gas fed out of the discharge of the cathode 4 at the upstream side and the gas stream 2 which does not pass the discharger. For example, the gas stream 2 which does not pass the discharging area at the upstream side is injected through a gas injection unit 13 to the discharging area of the cathode 5 and an anode 7 at the downstream side. Thus, the gas stream 1 heated in the discharging area at the upstream side is mixed with the gas stream 2, the gas temperature drops, and each cathode row is, therefore, provided with equal and high gain.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention (Industrial Application Field) The present invention relates to a high-output gas laser device, such as a CO2 laser or a Co laser device.

(Prior Art) Japanese Patent Publication No. 60-26318 is known as an example of a three-axis gas laser device in which a plurality of cathode rows are divided into degrees. In this method, if an attempt is made to make the discharge distribution along the flow uniform, the temperature of the laser gas will rise and the discharge will easily shift to an arc unless the discharge power to each cathode array is reduced. When the discharge power is reduced, the optical gain becomes insufficient and oscillation becomes difficult.

(Problems to be Solved by the Invention) A problem with the prior art is that the gas temperature becomes high on the downstream side of the laser gas.

(Objective of the present invention) It is an object of the present invention to provide a gas laser device that can prevent heating of the laser gas and realize high gain discharge over a wide discharge space by injecting gas that is not heated by discharge from the middle of the discharge region. .

[Configuration of the Invention (Means for Solving the Problem) Low-temperature gas is supplied from the middle of the cathode rows so that the temperature rise of the laser gas in each cathode row is the same. A gas flow path is provided for this purpose.

(Function) Since the structure can be configured so that the 1H degree rise ΔT of gas due to discharge in each cathode row is approximately equal for each cathode row,
Each cathode row can have substantially equal and high gain, and the configuration of the resonator optical path becomes easy.

(Embodiment) FIG. 1 shows an embodiment of the present invention, showing a surface of a laser discharge section cut approximately perpendicular to the optical path.

The gas flow 1.2 is guided and flows through a duct 3 forming a flow path. A first cathode row 4 is provided on the upstream side of the gas, a second cathode row 5 is provided on the downstream side, and an anode 6.7 is provided opposite to these.

These anodes and cathodes are connected to the discharge power source 8 via resistors 9.10 and 11.12, respectively.

Downstream cathode 5. The gas flow 2 that has not passed through the upstream discharge region is injected into the discharge region with the anode 7 through the gas outlet (groove) 13 .

With this configuration, heated gas flow 1 mixes with gas flow 2 in the discharge area on the upstream side, and the gas temperature decreases, so that the discharge power at the discharge section cathode 5° and anode 7 on the downstream side is reduced. Increase injection capacity.

An electrode 15 connected to a power source through a resistor 14 is an auxiliary discharge electrode and serves to improve the uniformity of discharge in the discharge space on the upstream side. For the discharge area on the downstream side, the discharge section on the upstream side serves as an auxiliary discharge.

The injection part of the flow path 2 is not limited to the anode side, and may be performed, for example, from between the cathode rows or from both the anode side and the cathode side. Reference numeral 16 and 17 represent the optical path cross section of the laser beam, which is set at a location where the gain is high and uniformity is good.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of a laser discharge section according to an embodiment of the present invention, taken approximately perpendicular to the optical path. 1.2... Divided gas flow, 4, 5... Cathode 6
．． 7...Anode, 13...Gas injection part 8...Discharge power supply

Claims (1)

[Claims] The optical axis of the laser beam, the flow direction of the laser gas, and the direction of the discharge path are approximately perpendicular to each other, and the cathodes divided into a plurality of pieces are arranged in at least two rows on the upstream and downstream sides of the laser gas. A gas laser device characterized in that the gas flowing into the discharge section of the column is configured such that the gas flowing out from the discharge of the upstream cathode and the gas flow that does not pass through the discharge section merge.