JPS635310A - 光接続回路の製造方法 - Google Patents
光接続回路の製造方法Info
- Publication number
- JPS635310A JPS635310A JP15037186A JP15037186A JPS635310A JP S635310 A JPS635310 A JP S635310A JP 15037186 A JP15037186 A JP 15037186A JP 15037186 A JP15037186 A JP 15037186A JP S635310 A JPS635310 A JP S635310A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- optical fiber
- substrate
- groove
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 48
- 238000004519 manufacturing process Methods 0.000 title description 6
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000013307 optical fiber Substances 0.000 claims abstract description 29
- 238000005530 etching Methods 0.000 claims abstract description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 29
- 229910052710 silicon Inorganic materials 0.000 claims description 24
- 239000010703 silicon Substances 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 16
- 238000005253 cladding Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15037186A JPS635310A (ja) | 1986-06-25 | 1986-06-25 | 光接続回路の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15037186A JPS635310A (ja) | 1986-06-25 | 1986-06-25 | 光接続回路の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS635310A true JPS635310A (ja) | 1988-01-11 |
| JPH0567201B2 JPH0567201B2 (enrdf_load_stackoverflow) | 1993-09-24 |
Family
ID=15495528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15037186A Granted JPS635310A (ja) | 1986-06-25 | 1986-06-25 | 光接続回路の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS635310A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07152478A (ja) * | 1993-11-30 | 1995-06-16 | Kokusai Media Kenkyu Zaidan | 方向スイッチ装置およびこれを使用したグラフィック表示装置 |
| US6170996B1 (en) | 1998-10-02 | 2001-01-09 | Fujitsu Limited | Optical module encapsulated with resin and manufacturing method therefor |
| US6181854B1 (en) | 1998-09-18 | 2001-01-30 | Fujitsu Limited | Optical module packaged with molded resin |
| US8036507B2 (en) | 2008-07-11 | 2011-10-11 | Nec Corporation | Optical waveguide device and manufacturing method thereof |
-
1986
- 1986-06-25 JP JP15037186A patent/JPS635310A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07152478A (ja) * | 1993-11-30 | 1995-06-16 | Kokusai Media Kenkyu Zaidan | 方向スイッチ装置およびこれを使用したグラフィック表示装置 |
| US6181854B1 (en) | 1998-09-18 | 2001-01-30 | Fujitsu Limited | Optical module packaged with molded resin |
| US6170996B1 (en) | 1998-10-02 | 2001-01-09 | Fujitsu Limited | Optical module encapsulated with resin and manufacturing method therefor |
| US8036507B2 (en) | 2008-07-11 | 2011-10-11 | Nec Corporation | Optical waveguide device and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0567201B2 (enrdf_load_stackoverflow) | 1993-09-24 |
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