JPS6351447U - - Google Patents

Info

Publication number
JPS6351447U
JPS6351447U JP14617586U JP14617586U JPS6351447U JP S6351447 U JPS6351447 U JP S6351447U JP 14617586 U JP14617586 U JP 14617586U JP 14617586 U JP14617586 U JP 14617586U JP S6351447 U JPS6351447 U JP S6351447U
Authority
JP
Japan
Prior art keywords
wafer
mounting surface
suction
suction table
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14617586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14617586U priority Critical patent/JPS6351447U/ja
Publication of JPS6351447U publication Critical patent/JPS6351447U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Jigs For Machine Tools (AREA)
JP14617586U 1986-09-24 1986-09-24 Pending JPS6351447U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14617586U JPS6351447U (US07534539-20090519-C00280.png) 1986-09-24 1986-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14617586U JPS6351447U (US07534539-20090519-C00280.png) 1986-09-24 1986-09-24

Publications (1)

Publication Number Publication Date
JPS6351447U true JPS6351447U (US07534539-20090519-C00280.png) 1988-04-07

Family

ID=31058403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14617586U Pending JPS6351447U (US07534539-20090519-C00280.png) 1986-09-24 1986-09-24

Country Status (1)

Country Link
JP (1) JPS6351447U (US07534539-20090519-C00280.png)

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