JPS634959A - Ceramic ink jet head and its preparation - Google Patents

Ceramic ink jet head and its preparation

Info

Publication number
JPS634959A
JPS634959A JP15038386A JP15038386A JPS634959A JP S634959 A JPS634959 A JP S634959A JP 15038386 A JP15038386 A JP 15038386A JP 15038386 A JP15038386 A JP 15038386A JP S634959 A JPS634959 A JP S634959A
Authority
JP
Japan
Prior art keywords
electrodes
electrode
layers
ink
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15038386A
Other languages
Japanese (ja)
Other versions
JPH0796301B2 (en
Inventor
Michihisa Suga
菅 通久
Kazuaki Uchiumi
和明 内海
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61150383A priority Critical patent/JPH0796301B2/en
Priority to US06/923,105 priority patent/US4766671A/en
Priority to DE8686308344T priority patent/DE3688356T2/en
Priority to EP86308344A priority patent/EP0220959B1/en
Publication of JPS634959A publication Critical patent/JPS634959A/en
Publication of JPH0796301B2 publication Critical patent/JPH0796301B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14209Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5194Metallisation of multilayered ceramics, e.g. for the fabrication of multilayer ceramic capacitors
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/85Coating or impregnation with inorganic materials
    • C04B41/88Metals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/702Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
    • H01L21/705Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thick-film circuits or parts thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14209Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B41J2002/14217Multi layer finger type piezoelectric element
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • H04R17/04Gramophone pick-ups using a stylus; Recorders using a stylus
    • H04R17/08Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously

Abstract

PURPOSE:To obtain an ink jet head excellent in the uniformity of a jet characteristic, by a method wherein, a plurality of electrodes each constituted by laminating at least three layers at a definite interval are provided in the wall of a pressure chamber and electrode terminal parts constituted so that mutual odd-number-th electrodes and mutual even-number-th electrodes can be electrically connected through through- holes formed in the lamination direction of the electrodes are provided. CONSTITUTION:The electrode pattern of a first layer and that of a third layer counted from the side near to an ink chamber have lead-out electrodes 108, 109 electrically connecting drive electrodes 107 and further connecting the same to an external drive circuit and the electrode patterns of second and fourth layers have such a shape that lead-out electrodes 110 for connecting the drive electrodes 107 to the external drive circuit indivisually extend from the drive electrodes 107. Two electrode patterns are alternately laminated in an up-and-down direction and through-holes 113 piercing through ceramic layers are formed to the central parts of the electrode terminal parts 111, 112 provided to the leading ends of the lead-out electrodes 109, 110 and filled with a conductive paste before and after the laminate of the ceramic layers is sintered to respectively connect the electrodes of odd-number and even-number layers.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は、各種のプリンタやファクシミリ装置におい
て使用されるインクジェットヘッドとその製造方法に関
し、特に、電気機械変換材料を用いてインクにパルス圧
力を作用させ、インク噴射を行うドロップオンデイマン
ト型のインクジェットヘッドとその製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an inkjet head used in various printers and facsimile machines and a method of manufacturing the same. The present invention relates to a drop-on demant type inkjet head that performs ink jetting and a method of manufacturing the same.

(従来の技術) オンデイマント型インクジェットにおいてインクにパル
ス圧力を作用させる方法としては、ダイヤフラム方式が
広く知られている。すなわち、インクジェットヘッド内
にあるインク室の壁を構成している金属もしくはガラス
等の板に、矩形もしくは円形に形成された平板状の電気
機械変換素子を貼り付けてダイヤフラムを形成する。前
記電気機械変換素子を、その厚み方向への電圧印加によ
り面方向に収縮変形させると、ダイヤプラムを形成して
いるインク室の壁はインク室内に向って湾曲する。その
結果、パルス圧力が作用してインク室内のインクはイン
ク室外に押し出される。
(Prior Art) A diaphragm method is widely known as a method for applying pulse pressure to ink in an on-day inkjet. That is, a diaphragm is formed by pasting a rectangular or circular plate-like electromechanical transducer element on a plate made of metal, glass, or the like that constitutes the wall of an ink chamber in an inkjet head. When the electromechanical transducer is contracted and deformed in the plane direction by applying a voltage in the thickness direction, the wall of the ink chamber forming the diaphragm is curved toward the ink chamber. As a result, the pulse pressure acts and the ink inside the ink chamber is pushed out of the ink chamber.

(発明が解決しようとする問題点) 前記のパルス圧力発生手段においては、電気機械変換素
子をインク室壁の所定の位置に精密にがつ十分な接着強
度をもって貼り付けることが重要である。しかし、電気
機械変換素子はインク室の壁の外側に固定させるため、
壁の内側のインク室に対応した位置に電気機械変換素子
を精度よく固定することは困難であった。また、接着部
分の接着層の厚みや接着強度を常に指定範囲内に再現す
るために厳しい工程管理が実施されるが、それでも接着
状態のばらつきによるインク噴射特性のばらつきを押え
ることは困難であり、このような接着工程は除去するこ
とが強く望まれていた。
(Problems to be Solved by the Invention) In the pulse pressure generating means described above, it is important to affix the electromechanical transducer to a predetermined position on the wall of the ink chamber with sufficient adhesive strength to ensure precision. However, since the electromechanical transducer is fixed outside the wall of the ink chamber,
It has been difficult to accurately fix the electromechanical transducer at a position corresponding to the ink chamber inside the wall. In addition, strict process control is carried out to always reproduce the thickness and adhesive strength of the adhesive layer at the adhesive part within the specified range, but it is still difficult to suppress variations in ink jetting characteristics due to variations in the adhesive state. It has been strongly desired to eliminate such an adhesion process.

また、前記のパルス圧力発生手段によりインクに作用す
る圧力やノズルから噴射するインクの体積は電気機械変
換素子に印加する電圧値に依存している。従来のオンデ
イマント型インクジ豊ットヘッドにおいては、十分な大
きさの圧力をインクに作用させ必要なインク体積をノズ
ルより噴射させるために、印加パルスの電圧値は50V
ないし300vといった高い値にする必要があった。し
かし、駆動回路の高信頼化あるいは低価格化という観点
からは50V以下の低電圧化が強く望まれていた。
Further, the pressure applied to the ink by the pulse pressure generating means and the volume of ink ejected from the nozzle depend on the voltage value applied to the electromechanical transducer. In the conventional on-day cloak-type inkjet head, the voltage value of the applied pulse is 50 V in order to apply a sufficient amount of pressure to the ink and eject the necessary volume of ink from the nozzle.
It was necessary to set the voltage to a high value such as 300v. However, from the viewpoint of increasing the reliability or reducing the cost of the drive circuit, there has been a strong desire to reduce the voltage to 50 V or less.

前記低電圧化を実現するものとして、厚みを薄くし厚み
方向の電極間隔を挟めた電気機械変換素子を厚み方向に
多数積層した、いわゆる積層アクチュエータが知られて
いる。この積層アクチュエータをインク室の壁の外部に
接着することにより低電圧駆動が可能なドロップオンデ
イマント型インクジェットヘッドの実現が期待されるが
、この場合でも、インク室形状に対して定められた接着
位置に積層アクチュエータを常に精度よく固定すること
の困難性や、接着状態に依存したインク噴射特性のばら
つきといった問題は未解決のままであった。
A so-called laminated actuator, in which a large number of thin electromechanical transducer elements are laminated in the thickness direction with electrode spacing in the thickness direction, is known as a device that achieves the above-mentioned voltage reduction. By adhering this laminated actuator to the outside of the wall of the ink chamber, it is expected that a drop-on demant type inkjet head that can be driven at low voltage will be realized. Problems such as the difficulty of always accurately fixing the laminated actuator in position and the variation in ink ejection characteristics depending on the adhesion state remained unsolved.

(問題点を解決するための手段) 本願第1の発明によれば、電気機械変換特性を有するセ
ラミック材料からなりかつ内部にインク供給口から圧力
室を通ってノズルに連通ずるインク流路が形成された平
板セラミック体で構成され、前記圧力室の壁の内部に一
定間隔で少なくとも3層以上積層された複数の電極を有
し、かつ前記複数電極の内の奇数番目同志および偶数番
目同志が前記電極の積層方向に形成されたスルーホール
を通して電気的に接続できるように構成された電極端子
部を有することを特徴としたインクジェットヘッドが得
られる。
(Means for Solving the Problems) According to the first invention of the present application, an ink flow path is formed inside the ink supply port, passes through the pressure chamber, and communicates with the nozzle, and is made of a ceramic material having electromechanical conversion characteristics. The pressure chamber has a plurality of electrodes laminated in at least three layers at regular intervals inside the wall of the pressure chamber, and among the plurality of electrodes, odd-numbered comrades and even-numbered comrades are An inkjet head characterized in that it has an electrode terminal portion configured to be electrically connected through a through hole formed in the stacking direction of the electrodes.

また、本願第2の発明によれば、感光性樹脂シートをイ
ンク供給口から圧力室を通ってノズルに連通ずるインク
流路の平面形状に合わせて成形1空孔母型を作成する工
程と、電気機械変換特性を有するセラミック材料から成
るグリーンシート上にスルーホールを有する電極端子部
を持った第1の電極を導電ペーストを用いて形成する工
程と、前記グリーンシート上にスルーホールを有する電
極端子部を持った第2の電極を導電ペーストを用いて形
成する工程と、前記第1および第2の電極が形成された
2種のグリーンシートを交互に少なくとも3層以上積層
して成る多層電極層に前記空孔母型および前記グリーン
シートを積層圧着した積層体を形成する工程と、前記電
極端子部に形成された前記スルーホールに導電ペースト
を充填しそれぞれ前記第1の電極同志および前記第2の
電極同志を積層方向に電気的に接続する工程と、前記積
層体を焼結する工程とから成ることを特徴としたセラミ
ックインクジェットヘッドの製造方法が得られる。
Further, according to the second invention of the present application, the step of forming a molding hole matrix in accordance with the planar shape of the ink flow path that communicates the photosensitive resin sheet from the ink supply port through the pressure chamber to the nozzle; A step of forming a first electrode having an electrode terminal portion having a through hole on a green sheet made of a ceramic material having electromechanical conversion characteristics using a conductive paste, and an electrode terminal having the through hole on the green sheet. a multilayer electrode layer formed by alternately laminating at least three layers of two types of green sheets on which the first and second electrodes are formed; a step of forming a laminate by laminating and press-bonding the hole matrix and the green sheet, and filling the through holes formed in the electrode terminal portion with conductive paste to connect the first electrode and the second electrode, respectively. There is obtained a method for manufacturing a ceramic inkjet head characterized by comprising the steps of electrically connecting the electrodes in the lamination direction, and sintering the laminated body.

(作用) 本願発明によれば、セラミックグリーンシートと空孔母
型とを積層してインクジェットヘッドを作成する過程で
、電極パターンを形成したセラミックグリーンシートを
多数積層することにより。低電圧駆動が可能な積層アク
チュエータを一体に内蔵したインクジェットヘッドを得
ることができる。内蔵された積層アクチュエータは、イ
ンク室の壁と一体となってパルス圧力発生用のダイヤフ
ラムを形成する。このような構造のダイヤフラムは、応
答性が極めて速くなり、圧力パルスも強力なものが得ら
れるため、インクジェット動作の高速化および安定化の
ために極めて有効であることが確認された。さらに、積
層アクチュエータを一体に内蔵させることにより、接着
状態のばらつきとか接着位置のずれ等の問題を考慮する
必要が殆んどなくなり、インク噴射特性が揃ったインク
ジェットヘッドを得ることが可能になった。
(Function) According to the present invention, a large number of ceramic green sheets with electrode patterns formed thereon are laminated in the process of laminating ceramic green sheets and a void matrix to create an inkjet head. It is possible to obtain an inkjet head that integrally incorporates a laminated actuator that can be driven at low voltage. The built-in laminated actuator is integrated with the wall of the ink chamber to form a diaphragm for generating pulse pressure. It has been confirmed that a diaphragm having such a structure is extremely effective for increasing the speed and stabilizing the inkjet operation, since the response is extremely fast and a strong pressure pulse can be obtained. Furthermore, by integrating the laminated actuator, there is almost no need to consider problems such as variations in the bonding state or misalignment of the bonding position, making it possible to obtain an inkjet head with uniform ink ejection characteristics. .

(実施例) 以下に、この発明について図面を参照しながら詳細に説
明する。
(Example) The present invention will be described in detail below with reference to the drawings.

第1図は、本願第1の発明によるセラミックインクジェ
ットヘッドの一実施例の部分断面図を含む斜視図である
。インクは、図示されていない外部インク溜めより導管
等によって接続口105に導かれ、共通インク室104
を経てインク供給口101、圧力室102を通ってノズ
ル103より外部に噴射される。この実施例では、共通
インク室104よりノズル103に至るインク経路が4
水平行に形成された4−ノズルヘッドが示されているが
、ノズル数の選択は所要の記録速度を満足するように任
意に行なわれる。このインクジェットヘッドは電極材料
を除いて全体が電気機械変換特性を有するセラミック材
料から成っている。第1図では、ヘッドは薄いセラミッ
ク板の積層構造を有することが示されており、電気機械
変換特性を有する複数種のセラミック材料を用いて複合
化することができる。全体を同一のセラミック材料で構
成した場合は、各層間のセラミック材料間の境界は一体
化して識別できない。第1図において、インク室102
の上側の壁は複数のセラミック層106から成っている
。この実施例では4層の場合を示しであるが、これに限
定されるものではなく、層の厚みや電極面積に応じて積
層数は任意に選択される。各セラミック層106の上面
には電極が形成されている。これらの電極は、インク室
の壁を変形させるための駆動電極107と、前記駆動電
極107を図示されていない駆動回路に接続するための
引き出し電極とがら成っている。駆動電極107はどの
セラミック層106の表面においても、全く同一のパタ
ーンで形成され、上下方向に重なるように配置されてい
る。−方、前記引き出し電極は奇数層との間ではそれぞ
れ第2図(a)および(b)に示したように異なってい
る。すなわち、インク室に近い側から教えて第1層目お
よび第3層目の電極パターンは第2図(a)に示すよう
に、各駆動電極107を電気的に接続しさらに外部駆動
回路に接続するだめの引き出し電極108および109
を有するものになっている。また、第2図(b)は第2
層目および第4層目の電極パターンを示したもので、駆
動電極107より個々に外部駆動回路に接続するための
引き出し電極110が伸びた形状になっている。第2図
で示した2つの電極パターンは、第3図に示すように、
交互に上下方向に積層される。奇数層および偶数層の電
極はそれぞれ引き出し線109および110の先端の電
極端子部111および112において電気的に接続され
ている。この接続は本実施例においては次のように積層
方向に行なわれる。すなわち、電極端子部111および
112には吊央部分にセラミック層を貫通するスルーホ
ール113を形成しておき、これらをセラミック層の積
層体を焼結する前か焼結した後に前記スルーホールに導
電ペーストを充填することにより電気的な接続を得てい
る。
FIG. 1 is a perspective view including a partial cross-sectional view of an embodiment of a ceramic inkjet head according to the first invention of the present application. Ink is guided from an external ink reservoir (not shown) to the connection port 105 through a conduit or the like, and is then transferred to the common ink chamber 104.
The ink is then ejected from the nozzle 103 through the ink supply port 101 and the pressure chamber 102. In this embodiment, there are four ink paths from the common ink chamber 104 to the nozzle 103.
Although a four-nozzle head formed in horizontal rows is shown, the number of nozzles may be selected arbitrarily to satisfy the required recording speed. This inkjet head is entirely made of a ceramic material having electromechanical conversion properties, except for the electrode material. In FIG. 1, the head is shown to have a laminated structure of thin ceramic plates, which can be composited using multiple types of ceramic materials having electromechanical transducing properties. If the entire structure is made of the same ceramic material, the boundaries between the ceramic materials of each layer are integrated and cannot be identified. In FIG. 1, the ink chamber 102
The upper wall of is comprised of a plurality of ceramic layers 106. Although this example shows the case of four layers, the number of layers is not limited to this, and the number of layers can be arbitrarily selected depending on the thickness of the layers and the area of the electrodes. An electrode is formed on the upper surface of each ceramic layer 106. These electrodes consist of a drive electrode 107 for deforming the wall of the ink chamber, and an extraction electrode for connecting the drive electrode 107 to a drive circuit (not shown). The drive electrodes 107 are formed in exactly the same pattern on every surface of the ceramic layer 106 and are arranged so as to overlap in the vertical direction. - On the other hand, the extraction electrodes are different from the odd-numbered layers as shown in FIGS. 2(a) and 2(b), respectively. That is, as shown in FIG. 2(a), the electrode patterns of the first and third layers from the side closest to the ink chamber electrically connect each drive electrode 107 and are further connected to an external drive circuit. Sudame extraction electrodes 108 and 109
It has become a thing that has. In addition, Fig. 2(b) shows the second
This figure shows the electrode patterns of the second and fourth layers, and has a shape in which lead-out electrodes 110 for connecting to external drive circuits individually extend from the drive electrodes 107. The two electrode patterns shown in Figure 2 are as shown in Figure 3.
They are stacked alternately in the vertical direction. The electrodes of the odd and even layers are electrically connected at electrode terminal portions 111 and 112 at the tips of lead wires 109 and 110, respectively. In this embodiment, this connection is made in the stacking direction as follows. That is, a through hole 113 that penetrates the ceramic layer is formed in the central portion of the electrode terminal portions 111 and 112, and these holes are electrically conductive into the through hole before or after sintering the ceramic layer stack. Electrical connection is obtained by filling with paste.

前記の電極積層部分を積層アクチュエーターとして機能
させるためには、電極間のセラミック層を予め分極して
おく必要がある。この分極は、従来の積層アクチュエー
ターの場合と同様な方法に従って行なわれるが、本実施
例の場合、二つの電極端子部111と112との間に所
定の高電圧を短時間印加することにより行なわれる。こ
の結果、駆動電極107に挟まれた部分のセラミック層
は電極に垂直な方向に分極され、かつ分極の向きは層毎
に逆向きとなる。
In order to make the electrode laminated portion function as a laminated actuator, it is necessary to polarize the ceramic layer between the electrodes in advance. This polarization is performed according to the same method as in the case of conventional laminated actuators, but in the case of this embodiment, it is performed by applying a predetermined high voltage for a short time between the two electrode terminal parts 111 and 112. . As a result, the portion of the ceramic layer sandwiched between the drive electrodes 107 is polarized in a direction perpendicular to the electrodes, and the direction of polarization is reversed for each layer.

次に、本願第2の発明によるインクジェットヘッドの製
造方法について図面を参照しながら詳細に説明する。
Next, a method for manufacturing an inkjet head according to the second invention of the present application will be described in detail with reference to the drawings.

第4図(a)、(b)、(c)、(d)、(e)は、こ
の発明による製造方法の一実施例として、流路形状に合
わせた空孔母型の形成から焼結に至るまでの工程を説明
するための工程図である。空孔母型の形成は、まず第4
図(a)に示したように、ポリエステルフィルム等のキ
ャリアフィルム114上に感光性樹脂115を所定の厚
さに均一に塗布して作成した感光性樹脂シート116の
上に、流路形状と同一のパターンが形成されたフォトマ
スク117を重ね、光を照射して露光を行なう。次に、
第4図(b)に示したように、現像処理を行なって所定
の空孔母型118を形成する。
FIGS. 4(a), (b), (c), (d), and (e) show an example of the manufacturing method according to the present invention, from the formation of a cavity matrix to the shape of the flow path to sintering. It is a process diagram for explaining the process up to. The formation of the vacancy matrix begins with the fourth step.
As shown in Figure (a), a photosensitive resin sheet 116 made by uniformly applying a photosensitive resin 115 to a predetermined thickness on a carrier film 114 such as a polyester film is placed on a photosensitive resin sheet 116 that has the same shape as the flow path. A photomask 117 with a pattern formed thereon is placed on top of the photomask 117, and light is irradiated to perform exposure. next,
As shown in FIG. 4(b), a development process is performed to form a predetermined void matrix 118.

次の第4図(e)に示した積層工程においては、空孔母
型118を内部に挟み込むようにセラミックグリーンシ
ートを積層する。ここで使用するセラミックグリーンシ
ートは、−般的な方法に従ってセラミック粉末と有機バ
インダー、可塑剤、溶剤等とを混合分散することにより
泥漿状態としたものを、ドクターブレード法、キャステ
ィング法等の広く知られた塗布方法により、プラスチッ
クフィルムガラス板、金属シート等の基板上に所定の厚
さに塗布し乾燥することによって作成する。乾燥後、基
板から剥離したセラミックグリーンシートは、打ち抜き
或いは切断等により所定の寸法形状に仕上げられ、さら
に必要に応じてパンチング等によるスルーホールの形成
や導電ペーストを用いた印刷による表面電極の形成を行
なう。この実施例においては、先に第2図(a)および
(b)に示した異なった電極パターン119aおよび1
19bが表面に形成された2種のグリーンシー) 12
0aおよび120bが各々2枚ずつ交互に積層されてい
る。これ等の表面に電極を有するグリーンシートはさら
に、先に第3図に示しく11) たように、電極端子部111および112の中央に対応
する位置にスルーホール113が形成されている。
In the next lamination step shown in FIG. 4(e), ceramic green sheets are laminated so that the cavity matrix 118 is sandwiched therein. The ceramic green sheets used here are made into a slurry by mixing and dispersing ceramic powder with organic binders, plasticizers, solvents, etc. according to general methods, and are produced using widely known methods such as doctor blade method and casting method. It is prepared by applying a plastic film to a predetermined thickness onto a substrate such as a glass plate or a metal sheet using a coating method described above and drying it. After drying, the ceramic green sheet peeled from the substrate is punched or cut into a predetermined size and shape, and if necessary, through holes are formed by punching or surface electrodes are formed by printing with conductive paste. Let's do it. In this embodiment, the different electrode patterns 119a and 1 shown previously in FIGS. 2(a) and 2(b) are used.
Two types of green sea with 19b formed on the surface) 12
Two sheets of each of 0a and 120b are alternately stacked. These green sheets having electrodes on their surfaces further have a through hole 113 formed at a position corresponding to the center of the electrode terminal portions 111 and 112, as shown in FIG. 3 (11).

第4図(e)において、グリーンシート121は表面電
極やスルーホールを持たないが、外形寸法はグリーンシ
ー) 120aおよび120bと同一に作られる。
In FIG. 4(e), the green sheet 121 has no surface electrodes or through holes, but is made to have the same external dimensions as the green sheets 120a and 120b.

これ等のグリーンシート120a、 120bおよび1
21はキャリアフィルムから剥離した空孔母型118と
共に、圧着用の金型の中に所定の順番で積層されさらに
圧力が加えられ、第4図(d)に示すように一体化する
。この圧着工程pは必要に応じて圧力とともに熱が加え
られる。この圧着により、グリーンシートは局部的に流
動し、空孔母型を完全に包み込むように変形し、第4図
(e)に示す形となる。
These green sheets 120a, 120b and 1
21 are laminated in a predetermined order in a press mold together with the hollow matrix mold 118 peeled from the carrier film, and further pressure is applied to integrate them as shown in FIG. 4(d). In this compression process p, heat is applied along with pressure as necessary. Due to this pressure bonding, the green sheet locally flows and deforms so as to completely envelop the pore matrix, resulting in the shape shown in FIG. 4(e).

このようにして作られた積層体122は必要に応じて所
定の寸法に切断した後、脱バインダー処理を施こす。す
なわち、酸化雰囲気中でゆっくり加熱することにより、
空孔母型を形成する樹脂や、セラミックグリーンシート
中にある有機物を分解消失させる。通常これ等の有機物
は500°Cないし600°Cの温度で完全に分解し酸
化するが、急激な温度上昇を行なうと積層体が破損する
。このため、温度上昇速度を256C/時間以下に抑え
、さらに、500°Cないし600°Cに充分長い時間
保持することで有機物を完全に消失させる。この結果、
積層体122内部の空孔母型118は消滅し、その跡は
空孔となってインク流路が形成される。
The thus produced laminate 122 is cut into predetermined dimensions as required, and then subjected to binder removal treatment. That is, by slowly heating in an oxidizing atmosphere,
It decomposes and eliminates the resin that forms the pore matrix and the organic matter in the ceramic green sheet. Normally, these organic substances are completely decomposed and oxidized at a temperature of 500°C to 600°C, but if the temperature is suddenly increased, the laminate will be damaged. Therefore, by suppressing the temperature increase rate to 256 C/hour or less and maintaining the temperature at 500°C to 600°C for a sufficiently long time, the organic substances are completely disappeared. As a result,
The void matrix 118 inside the laminate 122 disappears, leaving behind voids to form ink channels.

脱バインダー処理が行なわれた積層体122は、続いて
所定の温度で焼成して磁器化し、その後必要に応じて所
定の外形寸法に切断し、またノズル端面の研磨仕上げを
施こしてインクジェットヘッドが得られる。
The laminate 122 that has been subjected to the binder removal process is then fired at a predetermined temperature to become porcelain, and then cut into predetermined external dimensions as necessary, and the nozzle end face is polished to form an inkjet head. can get.

グリーンシートを構成するセラミック粉体としては、P
bTiO3−PbZrO3系の圧電材料を用いた。電極
材料としては、Ag/Pdの比率が70/30(重量比
)の導電ペーストを用いた。空孔母型用の感光性樹脂に
はアクリル系光硬化性のものを使用し、紫外線による露
光の後、メチルエチルケトンを用いて現像した。
The ceramic powder that makes up the green sheet is P
A piezoelectric material based on bTiO3-PbZrO3 was used. As the electrode material, a conductive paste with an Ag/Pd ratio of 70/30 (weight ratio) was used. An acrylic photocurable resin was used as the photosensitive resin for the pore matrix, and after exposure to ultraviolet light, development was performed using methyl ethyl ketone.

セリミックグリーンシートと空孔母型との圧着は、11
0°Cの加熱温度のもとで、250kg/cm2の圧力
を30分間印加して行なった。
The pressure bonding between the ceramic green sheet and the void matrix is 11
The heating was carried out by applying a pressure of 250 kg/cm2 for 30 minutes at a heating temperature of 0°C.

脱バインダー処理は、空気中で5°CI時間の昇温速度
で加熱した後、500°Cに3時間保持して行なった。
The binder removal treatment was carried out by heating in air at a temperature increase rate of 5°C I hours and then holding at 500°C for 3 hours.

この処理に続く焼結は空気中で1150°Cに2時間保
持して行なった。
This treatment was followed by sintering at 1150°C for 2 hours in air.

グリーンシート及び感光性樹脂は、厚さがいずれも約1
100pのものを用いた。焼結後、ノズルの寸法は約8
0pm角となり、また、焼結体内部の流路の高さも約8
0pmとなった。以上の条件のもとて先に第1図に示し
た構造のヘッドを試作した結果、安定なインク噴射動作
が得られた。また、4つの各ノズルから噴射したインク
滴の体積および飛翔速度が揃うようにパルス電圧を調整
した結果電圧値のばらつきは34Vから37Vの範囲に
収まり、各ノズル間の噴射特性の均一性が非常によいこ
とが確認された。
The thickness of the green sheet and photosensitive resin is approximately 1
A 100p one was used. After sintering, the nozzle dimensions are approximately 8
0 pm square, and the height of the flow path inside the sintered body is approximately 8
It became 0pm. Under the above conditions, a head having the structure shown in FIG. 1 was manufactured as a prototype, and as a result, a stable ink ejecting operation was obtained. In addition, as a result of adjusting the pulse voltage so that the volume and flight speed of the ink droplets ejected from each of the four nozzles are the same, the variation in voltage value is within the range of 34V to 37V, and the ejection characteristics between each nozzle are extremely uniform. It was confirmed that it is good for

比較のため、電極積層数が第1図の実施例の場合の半分
すなわち2層のインクジェットヘッドも試作した結果、
安定かつ特性の揃ったインク噴射を行なわせるために必
要な印加電圧は、55Vから70Vと大きく、ばはらつ
きの範囲も広がった。
For comparison, we also prototyped an inkjet head with half the number of laminated electrodes as in the embodiment shown in Figure 1, that is, two layers.
The applied voltage required to perform stable ink jetting with uniform characteristics is large, ranging from 55 V to 70 V, and the range of fluctuation has also widened.

(発明の効果) 以上のように発明の製造法によれば電気機械変換素子を
厚み方向に多数積層した積層アクチュエーターを一体的
に内蔵したセラミックインクジェットヘッドが得られた
。従来法における個別部品としての積層アクチュエータ
ーを組み付ける場合と比べると、積層アクチュエーター
の位置精度をより高くでき、噴射特性の均一性に優れた
インクジェットヘッドが得られた。その上、製造技術的
には何らの熟練を必要とするものではなく、容易に製造
でき、しかも量産性に優れている。このためデバイスコ
ストの大巾な低減が可能となった。さらに、積層アクチ
ュエーターの使用により駆動電圧を大巾に小さくするこ
とができ、駆動回路が簡単になり信頼性が向上するとと
もに、−層のコスト低減が可能になった。
(Effects of the Invention) As described above, according to the manufacturing method of the invention, a ceramic inkjet head that integrally incorporates a laminated actuator in which a large number of electromechanical transducers are laminated in the thickness direction was obtained. Compared to the conventional method in which laminated actuators are assembled as individual parts, the positional accuracy of the laminated actuators can be improved, and an inkjet head with excellent uniformity of jetting characteristics can be obtained. Moreover, it does not require any skill in terms of manufacturing technology, is easy to manufacture, and has excellent mass productivity. This has made it possible to significantly reduce device costs. Furthermore, by using a laminated actuator, the drive voltage can be significantly reduced, the drive circuit becomes simpler and reliability is improved, and the cost of the -layer can be reduced.

【図面の簡単な説明】[Brief explanation of the drawing]

“(込 第1図は本願箱1の発明によるセラミックインクジェッ
トヘッドの一実施例部分断面図を含む斜視図、第2図は
本願箱1の発明によるインクジェットヘッドの積層電極
層の奇数層および偶数層における電極パターンの一実施
例を示す斜視図、第3図は本願箱1の発明によるインク
ジェットヘッドにおける電極の積層状態の一実施例を示
す斜視図、第4図は本願箱2の発明による製造方法の製
造工程の一実施例を示す工程図であり、それぞれ、 101・・・インク供給口、102・・・圧力室、10
3・・・ノズル、104・・・共通インク室、105・
・・接続口、106・・・セラミック層、107・・・
駆動電極、108,109および110・・・引き出し
電極、111および112・・−電極端子部、113・
・・スルーホール、114・、・キャリアフィルム、1
15・・・感光性樹脂、116・・・感光性樹脂シート
、117・・・フォトマスク、118・・・空孔母型、
119aおよび119b・−・電極パターン、120a
および120b・・・グリーンシート、121・・・グ
リーンシート、122−・・積層体、 (廂
(Includes Fig. 1 is a perspective view including a partial sectional view of an embodiment of the ceramic inkjet head according to the invention in Box 1, and Fig. 2 is an odd-numbered layer and an even-numbered layer of the laminated electrode layer of the inkjet head according to the invention in Box 1. 3 is a perspective view showing an example of the laminated state of electrodes in an inkjet head according to the invention in Box 1, and FIG. 4 is a manufacturing method according to the invention in Box 2. It is a process diagram showing an example of the manufacturing process of 101... Ink supply port, 102... Pressure chamber, 10
3... Nozzle, 104... Common ink chamber, 105...
...Connection port, 106...Ceramic layer, 107...
Drive electrodes, 108, 109 and 110... Extraction electrodes, 111 and 112...- Electrode terminal portion, 113.
...Through hole, 114...Carrier film, 1
15... Photosensitive resin, 116... Photosensitive resin sheet, 117... Photomask, 118... Hole matrix mold,
119a and 119b --- electrode pattern, 120a
and 120b... green sheet, 121... green sheet, 122-... laminate,

Claims (1)

【特許請求の範囲】 1)電気機械変換特性を有するセラミック材料からなり
かつ内部にインク供給口から圧力室を通ってノズルに連
通するインク流路が形成された平板セラミック体で構成
され、前記圧力室の壁の内部に一定間隔で少なくとも3
層以上積層された複数の電極を有し、かつ前記複数電極
の内の奇数番目同志および偶数番目同志が前記電極の積
層方向に形成されたスルーホールを通して電気的に接続
できるように構成された電極端子部を有することを特徴
としたインクジェットヘッド。 2)感光性樹脂シートをインク供給口から圧力室を通っ
てノズルに連通するインク流路の平面形状に合わせて成
形し空孔母型を作成する工程と、電気機械変換特性を有
するセラミック材料から成るグリーンシート上にスルー
ホールを有する電極端子部を持った第1の電極を導電ペ
ーストを用いて形成する工程と、前記グリーンシート上
にスルーホールを有する電極端子部を持った第2の電極
を導電ペーストを用いて形成する工程と、前記第1およ
び第2の電極が形成された2種のグリーンシートを交互
に少なくとも3層以上積層して成る多層電極層に前記空
孔母型および前記グリーンシートを積層圧着した積層体
を形成する工程と、前記電極端子部に形成された前記ス
ルーホールに導電ペーストを充填しそれぞれ前記第1の
電極同志および前記第2の電極同志を積層方向に電気的
に接続する工程と、前記積層体を焼結する工程とから成
ることを特徴としたセラミックインクジェットヘッドの
製造方法。
[Scope of Claims] 1) A flat ceramic body made of a ceramic material having electromechanical conversion characteristics and in which an ink flow path communicating from an ink supply port through a pressure chamber to a nozzle is formed; At least 3 at regular intervals inside the walls of the chamber
An electrode having a plurality of electrodes laminated in more than one layer, and configured such that odd-numbered electrodes and even-numbered electrodes among the plurality of electrodes can be electrically connected through through holes formed in the stacking direction of the electrodes. An inkjet head characterized by having a terminal portion. 2) The process of forming a photosensitive resin sheet to match the planar shape of the ink flow path that communicates from the ink supply port through the pressure chamber to the nozzle to create a cavity matrix, and the process of molding the photosensitive resin sheet from a ceramic material with electromechanical conversion characteristics. forming a first electrode having an electrode terminal portion having a through hole on a green sheet using a conductive paste; and forming a second electrode having an electrode terminal portion having a through hole on the green sheet using a conductive paste. A step of forming using a conductive paste, and applying the void matrix and the green to a multilayer electrode layer formed by alternately laminating at least three or more layers of two types of green sheets on which the first and second electrodes are formed. A step of forming a laminate by laminating and press-bonding the sheets, and filling the through holes formed in the electrode terminal portions with conductive paste to electrically connect the first electrodes and the second electrodes in the stacking direction. A method for manufacturing a ceramic inkjet head, comprising the steps of: connecting the laminate to the laminate; and sintering the laminate.
JP61150383A 1985-10-29 1986-06-25 Ceramic inkjet head and method of manufacturing the same Expired - Lifetime JPH0796301B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP61150383A JPH0796301B2 (en) 1986-06-25 1986-06-25 Ceramic inkjet head and method of manufacturing the same
US06/923,105 US4766671A (en) 1985-10-29 1986-10-24 Method of manufacturing ceramic electronic device
DE8686308344T DE3688356T2 (en) 1985-10-29 1986-10-27 ELECTRONIC CERAMIC DEVICE AND RELATED PRODUCTION METHOD.
EP86308344A EP0220959B1 (en) 1985-10-29 1986-10-27 Ceramic electronic device and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61150383A JPH0796301B2 (en) 1986-06-25 1986-06-25 Ceramic inkjet head and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPS634959A true JPS634959A (en) 1988-01-09
JPH0796301B2 JPH0796301B2 (en) 1995-10-18

Family

ID=15495796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61150383A Expired - Lifetime JPH0796301B2 (en) 1985-10-29 1986-06-25 Ceramic inkjet head and method of manufacturing the same

Country Status (1)

Country Link
JP (1) JPH0796301B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0528637U (en) * 1991-03-08 1993-04-16 シチズン時計株式会社 Ink jet head drive electrode extraction structure
JPH07501045A (en) * 1991-06-20 1995-02-02 セプ、ホールディングス、インコーポレーテッド Topical compositions that promote healing of herpes lesions
US5872580A (en) * 1995-11-21 1999-02-16 Sharp Kabushiki Kaisha Ink jet recording head with stacked individual head members and a manufacturing method thereof
JP2004266154A (en) * 2003-03-03 2004-09-24 Tdk Corp Stacked piezoelectric element
US6986189B2 (en) 1998-09-17 2006-01-17 Seiko Epson Corporation Method of manufacturing a piezoelectric vibrator unit
US8104876B2 (en) * 2007-09-28 2012-01-31 Brother Kogyo Kabushiki Kaisha Liquid transporting apparatus and piezoelectric actuator

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3820922B2 (en) 2001-06-14 2006-09-13 ブラザー工業株式会社 Piezoelectric actuator and inkjet head using the same
DE60324489D1 (en) 2002-02-18 2008-12-18 Brother Ind Ltd Ink jet printhead and printing device provided therewith
JP4583888B2 (en) * 2004-11-11 2010-11-17 株式会社リコー Droplet discharge head, head driving device, liquid cartridge, and image forming apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038163A (en) * 1983-08-11 1985-02-27 Ricoh Co Ltd Ink jet head

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038163A (en) * 1983-08-11 1985-02-27 Ricoh Co Ltd Ink jet head

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0528637U (en) * 1991-03-08 1993-04-16 シチズン時計株式会社 Ink jet head drive electrode extraction structure
JPH07501045A (en) * 1991-06-20 1995-02-02 セプ、ホールディングス、インコーポレーテッド Topical compositions that promote healing of herpes lesions
US5872580A (en) * 1995-11-21 1999-02-16 Sharp Kabushiki Kaisha Ink jet recording head with stacked individual head members and a manufacturing method thereof
US6986189B2 (en) 1998-09-17 2006-01-17 Seiko Epson Corporation Method of manufacturing a piezoelectric vibrator unit
JP2004266154A (en) * 2003-03-03 2004-09-24 Tdk Corp Stacked piezoelectric element
US8104876B2 (en) * 2007-09-28 2012-01-31 Brother Kogyo Kabushiki Kaisha Liquid transporting apparatus and piezoelectric actuator

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