JPS6348611A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS6348611A JPS6348611A JP19196386A JP19196386A JPS6348611A JP S6348611 A JPS6348611 A JP S6348611A JP 19196386 A JP19196386 A JP 19196386A JP 19196386 A JP19196386 A JP 19196386A JP S6348611 A JPS6348611 A JP S6348611A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- recording medium
- magnetic recording
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000599 Cr alloy Inorganic materials 0.000 claims abstract description 14
- 239000010409 thin film Substances 0.000 claims description 43
- 239000000203 mixture Substances 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 abstract description 5
- 229910020630 Co Ni Inorganic materials 0.000 abstract description 4
- 229910002440 Co–Ni Inorganic materials 0.000 abstract description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 abstract description 2
- 230000007423 decrease Effects 0.000 abstract description 2
- 238000007747 plating Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 25
- 239000010408 film Substances 0.000 description 18
- 229910045601 alloy Inorganic materials 0.000 description 11
- 239000000956 alloy Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Abstract
Description
本発明は、磁気記録媒体に関するものである。 The present invention relates to magnetic recording media.
従来より、アルミニウム等の非磁性の基板上にＣｒ蒸着
膜を設け、このＣｒ蒸着膜上にｃｏ−旧又はＣｏ−Ｎｉ
−Ｃｒ等の磁性薄膜な設けた金属薄膜型の磁気記録媒体
が提案されてきている。
ところが、このような磁気記録媒体にあっては、磁性ハ
股の１摸厚が厚くなるにつれて、スパッタリング又は真
空蒸着法等のメッキ手段で形成される磁性薄膜の結晶粒
径は大きくなり、この結果記録信号の再生に際して大き
なノイズが発生し、Ｓ／Ｎが低下するという問題点があ
る。
そこで、このような問題点を解決する為に、磁気記録媒
体の磁性層を阜層で構成するのではなく、複数の層、例
えば二層で構成し、これらＣｏ系の磁性薄膜よりなる磁
性層間にＣｏ、Ｔｉ、＾１２０１、ＣｒＯ等からなる非
磁性層を設ける技術が提案（特開昭６０−８３２１８号
公報）されている。
しかし、この提案になる磁気記録媒体にあっても、記録
周波数を高めていくとモジュレーションノイズは比較的
大きいという問題点は充分には解決されていない。Conventionally, a Cr vapor deposited film is provided on a non-magnetic substrate such as aluminum, and a co-old or Co-Ni film is deposited on this Cr vapor deposited film.
A metal thin film type magnetic recording medium provided with a magnetic thin film such as -Cr has been proposed. However, in such magnetic recording media, as the thickness of the magnetic strip increases, the crystal grain size of the magnetic thin film formed by plating methods such as sputtering or vacuum evaporation increases; There is a problem in that a large amount of noise is generated during reproduction of the recorded signal, and the S/N ratio is reduced. Therefore, in order to solve these problems, the magnetic layer of a magnetic recording medium is not composed of a single layer, but is composed of multiple layers, for example, two layers, and an interlayer between these magnetic layers made of a Co-based magnetic thin film is used. A technique has been proposed (Japanese Unexamined Patent Application Publication No. 83218/1983) in which a nonmagnetic layer made of Co, Ti, ^1201, CrO, etc. is provided on the substrate. However, even with this proposed magnetic recording medium, the problem that modulation noise becomes relatively large as the recording frequency is increased has not been sufficiently solved.
本発明者は、前記の問題点に対する研究開発分進めてい
くうちに、現時点においてその理論的解決までは完全に
はなし得なかったものの、スパッタリング等のメッキ手
段で構成されるＣｏ−Ｎｉ、Ｃｏ−Ｎｉ−Ｃｒ等の複数
のＣｏ系磁性薄膜ノリの間にＣｒが約２３〜２７原子％
の組成のＣｏ−Ｃｒ系合金薄膜１゛Δ分設けておくと、
上記の問題点を大巾に解決できることを見出した。
この本発明における大きな特徴は、前記問題点の解決手
段として提案されてきた特開昭６０−８３２１８号公報
の技術は、Ｃｏ系磁性薄膜層の間に設ける磨としては非
磁性膜でなければならなかったのに対し、必ずしもそう
ではない点にある。
すなわち、本発明において、低ノイズ化な図る為に、複
数のＣｏ系磁性薄膜層の間に介在させるＣｏ−Ｃｒ系合
金薄膜は、Ｃｒが約２５原子％を境にしてこれより多い
場合には非磁性であるにもかかわらず、Ｃｒがこれより
少ない場合には磁性を示すのである。
従って、本願発明と特開昭６０−８３２１８号公報に示
される技術との間では、−見するとその理論的背景が同
じであるようにも、芒、われるものの、非磁性のもので
なければならないという制約が取り除かれている点にお
いて、理論的背景が異なるようにも思われ、前記問題点
の全面的な理論的解決を行なえなかったのである。
しかし、全面的な理論的解決をなし得なかったにもかか
わらず、ＣＯ系送磁性薄膜１複数層となし、これらのＣ
ｏ；ｉ’＋１性薄膜層間にＣｏが約２：３へ、２７ｙぶ
子％の組成のＣｏ−Ｃｒ系合金３膜を設けた磁気記録媒
体は、記録周波数を高めていってもモジュレーションノ
イズは小さく、高密度記録に適したものであったのであ
る。
尚、Ｃｏ系磁性薄膜層の間に設けられるＣｒが約２３〜
２７原子％の組成のＣｏ−Ｃｒ系合金薄膜の厚みは５′
ノ１００Å以下のものであることが望ましく、特に約２
０〜７０人のものであることが一層望ましい。
すなわち、このＣ「が約２３〜２７原子％の組成のＣｏ
−Ｃｒ系合金薄膜の厚みがあまりに薄すぎる場合には、
このＣｏ−Ｃｒ系合金薄膜を設けることによる効果発揮
の程度がそれだけ小さく、逆に厚くなりすぎると、これ
までの磁気記録再生装置との関係上がら磁性層の厚みを
それだけ薄くせざるを得なくなり、出力低下にもなりが
ねないからである。
又、ＣＯ系磁性薄膜の下地５嗅としてＣｒ膜が厚く、例
えば約２０００〜４０００人厚膜けられている場合に、
Ｃｏ−Ｃｒ系合金薄膜を複数のＣｏ系磁性薄膜層の間に
設けていると、これによる効果発揮が一段と太きなもの
であった。
尚、Ｃｒが約２３〜２７原子％の組成のＣｏ−Ｃｒ系合
金薄膜は一層のみでなく、二層、三層、・・というよう
に複数層設けてもよく、Ｃｏ系磁性薄膜層は三層、四層
・・となってもよい。As the inventor of the present invention progresses through research and development on the above-mentioned problems, although he has not been able to completely solve the problem theoretically at the present time, he has discovered that Co-Ni, Co-Ni, and Co- Approximately 23 to 27 atomic % of Cr is present between multiple Co-based magnetic thin film pastes such as Ni-Cr.
If a Co-Cr alloy thin film with a composition of 1゛Δ is provided,
We have found that the above problems can be largely solved. The major feature of the present invention is that the technique proposed in Japanese Patent Application Laid-Open No. 60-83218 as a means to solve the above-mentioned problem requires that the polishing layer provided between the Co-based magnetic thin film layers be a non-magnetic film. However, this is not necessarily the case. That is, in the present invention, in order to reduce noise, the Co-Cr alloy thin film interposed between the plurality of Co-based magnetic thin film layers has a Cr content of approximately 25 at%, and when the content is greater than this, Even though it is non-magnetic, if the Cr content is less than this, it exhibits magnetism. Therefore, although the present invention and the technology disclosed in JP-A-60-83218 appear to have the same theoretical background, the awn must be non-magnetic. It seems that the theoretical background is different in that this constraint has been removed, and it has not been possible to completely solve the above problem theoretically. However, although a comprehensive theoretical solution could not be achieved, one or more layers of CO-based magnetically transmitting thin films were developed, and these C
A magnetic recording medium in which a Co-Cr based alloy 3 film with a composition of 27yb%, with a Co ratio of approximately 2:3 between the o;i'+1 thin film layers, has no modulation noise even when the recording frequency is increased. It was small and suitable for high-density recording. Note that the Cr provided between the Co-based magnetic thin film layers is about 23 to
The thickness of the Co-Cr alloy thin film with a composition of 27 atomic % is 5'
It is desirable that the thickness be less than 100 Å, especially about 2
It is more preferable that the number of participants be between 0 and 70 people. In other words, this C" has a composition of about 23 to 27 atomic percent.
-If the thickness of the Cr-based alloy thin film is too thin,
If the effect of providing this Co-Cr alloy thin film is small, and if it becomes too thick, the thickness of the magnetic layer will have to be made thinner due to the relationship with conventional magnetic recording and reproducing devices. This is because it may lead to a decrease in output. In addition, when the Cr film is thick as the base layer of the CO-based magnetic thin film, for example, when the film is chipped by about 2,000 to 4,000 layers,
When a Co--Cr based alloy thin film was provided between a plurality of Co-based magnetic thin film layers, the resulting effect was even greater. Note that the Co-Cr alloy thin film having a composition of about 23 to 27 at% Cr may be provided not only in one layer, but also in multiple layers such as two layers, three layers, etc., and the Co-based magnetic thin film layer may have three layers. There may be layers, four layers, etc.
【実施例１】
図面は、本発明に係る磁気ディスクのような磁気記録媒
体の１実施例の概略図である。
同図中、１は表面にＮ１−Ｐメ・・Ｉキを施したアルミ
ニウム合金よりなる所定厚の基板であり、この基板１は
従来からのものと同様なものである。
２は、例えばマグネｌ・ロンスパッタ装置を用い、アル
ゴンガス圧１３ ｍＴｏｒｒ、基板７Ｍ度１００ ’Ｃ
の条件下でスパッタすることによって基板１上に設けら
れた約３０００大写のＣｒ膜である。
３ａは、このＣｒ膜膜上上Ｃｒ膜膜形形成同様な方法で
設けられた約１５０〜６００人、例えば約４００大写の
Ｃｏ−Ｘｌ−Ｃｒの磁性薄膜、４はこの磁性薄膜３ａ上
に同様な方法で設けられた約５０大写のＣｏ−Ｃｒ（Ｃ
ｒは約２５原子％）の合金薄膜、３ｂｉよ、この台金ｉ
１膜・１上に同様な方法で設けられた約１５０〜６００
人、例えば約４００大写のＣｏ−Ｎｉ−Ｃｒの磁性薄膜
である。Embodiment 1 The drawing is a schematic diagram of one embodiment of a magnetic recording medium such as a magnetic disk according to the present invention. In the figure, reference numeral 1 denotes a substrate of a predetermined thickness made of an aluminum alloy with N1-P marks, . 2 uses, for example, a magnetron sputtering device, an argon gas pressure of 13 mTorr, a substrate of 7M and a temperature of 100'C.
This is a Cr film of approximately 3,000 microns, which was provided on the substrate 1 by sputtering under the following conditions. 3a is a Co-Xl-Cr magnetic thin film of about 150 to 600, for example, about 400 large-scale images, which is formed by a method similar to the formation of the Cr film on this Cr film, and 4 is a similar magnetic thin film formed on this magnetic thin film 3a. Approximately 50 large-scale Co-Cr (C
r is about 25 atomic %) alloy thin film, 3bi, this base metal i
Approximately 150 to 600 particles provided in a similar manner on 1 film/1
For example, it is a Co--Ni--Cr magnetic thin film with a size of about 400.
【実施例２】
実施例１において、合金薄膜４のＣｏ−Ｃｒの組成をＣ
ｒが約２７原千％とするほかは全く同様に行ない、磁気
ディスクのような磁気記録媒体を得る。[Example 2] In Example 1, the composition of Co-Cr of the alloy thin film 4 was changed to C
A magnetic recording medium such as a magnetic disk is obtained by carrying out the same procedure except that r is about 27%.
【実施例３１
実施例１において、合金薄膜４のＣｏ−Ｃｒの組成をＣ
ｒが約２３原子％とするほかは全く同様に行ない、磁気
ディスクのような磁気記録媒体を得る。
【実施例４】
実施ＰＡｌにおいて、 Ｃｒ膜２の墜みを２０００人、
磁性薄膜３ａ、３ｂｃｒ）厚みを４４０人、合金薄膜４
の厚みを６０人とするほかは全く同様に行ない、磁気デ
ィスクのような磁気記録媒体を得る。[Example 31 In Example 1, the composition of Co-Cr of the alloy thin film 4 was changed to C
A magnetic recording medium such as a magnetic disk is obtained by carrying out the same procedure except that r is about 23 atomic %. [Example 4] In the practical PAl, 2000 people were asked to destroy the Cr film 2.
Magnetic thin film 3a, 3bcr) thickness 440, alloy thin film 4
A magnetic recording medium such as a magnetic disk is obtained by carrying out the same procedure except that the thickness of the magnetic disk is changed to 60.
【比較例１】
実施例１において、合金１膜４を説けず、磁性は膜３ａ
と磁性薄膜３ｂとがつながった磁気ディスクのような磁
気記録媒体を得る。[Comparative Example 1] In Example 1, the alloy 1 film 4 could not be confirmed, and the magnetism was determined by the film 3a.
A magnetic recording medium such as a magnetic disk in which a magnetic thin film 3b and a magnetic thin film 3b are connected is obtained.
【比較例２】
実施例１において、合金薄膜４の組成をＣｒが約３０原
子２≦のＣｏ−Ｃｒとするほかは全く同法に行ない、ｍ
気ディスクのような磁気記録媒体を得る。[Comparative Example 2] The same method as in Example 1 was followed except that the composition of the alloy thin film 4 was changed to Co-Cr with about 30 Cr atoms 2≦.
A magnetic recording medium such as a magnetic disk is obtained.
【比較例３】
実施例１において、合金薄膜４の組成をＣｒが約２０原
子％のＣｏ−Ｃｒとするほかは全く同様に行ない、磁気
ディスクのような磁気記録媒体を得る。Comparative Example 3 A magnetic recording medium such as a magnetic disk is obtained in exactly the same manner as in Example 1, except that the composition of the alloy thin film 4 is Co--Cr containing about 20 atomic % of Cr.
上記各列で得た磁気記録媒体について、この磁気記録媒
体を３８００ｒｐ１１で回転させ、そしてギャップＪ％
０．６μ糟、トラック幅３６μ悄、フライングバイト０
．３μ麟の磁気ヘッドを用いて電磁変換特性を調べたの
で、その結果を表に示す。
これによれば、磁性薄膜３ａと磁性薄膜３ｂとの間に、
Ｃ「が２３〜２７原子％の組成のＣｏ−Ｃｒ合金薄膜を
設けてなる磁気記録媒体は、磁性薄膜３ａ、３ｂ中にお
ける磁性粒子が微細化することによる為か、短波長領域
における再生出力及びＣ／ Ｎ等の電磁変換特性の向上
は著しく、高密度記録に潰れたしのになる。
これに対して、 Ｃｏ−Ｃｒ合金薄膜が設けられて１，
１ない比較例１の磁気記録媒体、Ｃｏ−Ｃｒ合金薄膜が
設けられるにしても、このＣｏ−Ｃｒ合金′３膜におけ
るＣｒが約３０原子％の比較例２の磁気記録媒体（特開
昭６０−８３２１８ ′＋公報における場合と同様に、
磁性３膜は非磁性膜を介して積層されたタイプの磁気記
録媒体）及びＣｏ−Ｃｒ合金薄膜におけるＣ「が約２０
原子％の比較例３の磁気記録媒体の短波長領域における
電磁変換特性は、そのいずれもがこれに対応する実施例
１のものよりも悪い。Regarding the magnetic recording medium obtained in each row above, this magnetic recording medium was rotated at 3800 rpm11, and the gap J%
0.6μ, track width 36μ, flying bite 0
．． The electromagnetic conversion characteristics were investigated using a 3 μm magnetic head, and the results are shown in the table. According to this, between the magnetic thin film 3a and the magnetic thin film 3b,
A magnetic recording medium provided with a Co-Cr alloy thin film having a composition of 23 to 27 at. The improvement in electromagnetic conversion characteristics such as C/N is remarkable, and it becomes a step ahead of high-density recording.In contrast, when a Co-Cr alloy thin film is provided,
Even if a Co-Cr alloy thin film is provided in the magnetic recording medium of Comparative Example 1, which does not have any -83218'+ As in the case in the publication,
The magnetic 3-layer film is a type of magnetic recording medium in which layers are stacked via a non-magnetic film) and the Co-Cr alloy thin film has a carbon content of about 20.
All of the electromagnetic conversion characteristics in the short wavelength region of the magnetic recording medium of Comparative Example 3 in terms of atomic % are worse than those of the corresponding Example 1.
本発明に係る磁気記録媒体は、複数のＣｏ系磁性？１ｉ
膜層の間に、Ｃｒが約２３〜２７原子％のＣｏ−Ｃｒ系
合金薄膜層を設けたので、短波長領域における再生出力
、Ｃ／ Ｎ等の電磁変換特性が向上し、高密度記録に適
したものになる等の特長含有する。The magnetic recording medium according to the present invention includes a plurality of Co-based magnetic recording media. 1i
Since a Co-Cr alloy thin film layer containing approximately 23 to 27 at% Cr is provided between the film layers, electromagnetic conversion characteristics such as reproduction output and C/N in the short wavelength region are improved, making it possible to achieve high-density recording. Contains features that make it suitable for use.
【図面の簡単な説明】
図面は、本発明に係る磁気記録媒体の１実施例の概略図
である。
１・・・基板、２．−Ｃｒｉ模、３ａ、３ｂ−磁性：３
膜、４・・・合金薄膜。
＋１；
１′＋−BRIEF DESCRIPTION OF THE DRAWINGS The drawing is a schematic diagram of one embodiment of a magnetic recording medium according to the present invention. 1... Substrate, 2. -Cri model, 3a, 3b-Magnetic: 3
Film, 4...Alloy thin film. +1; 1'+-
Claims (1)
子％の組成のＣｏ−Ｃｒ系合金薄膜層を設けたことを特
徴とする磁気記録媒体。A magnetic recording medium characterized in that a Co--Cr alloy thin film layer having a composition of about 23 to 27 atomic % Cr is provided between a plurality of Co-based magnetic thin film layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19196386A JPS6348611A (en) | 1986-08-19 | 1986-08-19 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19196386A JPS6348611A (en) | 1986-08-19 | 1986-08-19 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6348611A true JPS6348611A (en) | 1988-03-01 |
Family
ID=16283359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19196386A Pending JPS6348611A (en) | 1986-08-19 | 1986-08-19 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6348611A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6143388A (en) * | 1997-11-24 | 2000-11-07 | International Business Machines Corporation | Thin film disk with onset layer |
| US7425377B2 (en) | 2005-02-04 | 2008-09-16 | Hitachi Global Storage Technologies Netherlands B.V. | Incoherently-reversing magnetic laminate with exchange coupled ferromagnetic layers |
-
1986
- 1986-08-19 JP JP19196386A patent/JPS6348611A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6143388A (en) * | 1997-11-24 | 2000-11-07 | International Business Machines Corporation | Thin film disk with onset layer |
| US7425377B2 (en) | 2005-02-04 | 2008-09-16 | Hitachi Global Storage Technologies Netherlands B.V. | Incoherently-reversing magnetic laminate with exchange coupled ferromagnetic layers |
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