JPS6348561U - - Google Patents

Info

Publication number

JPS6348561U

JPS6348561U JP14307186U JP14307186U JPS6348561U JP S6348561 U JPS6348561 U JP S6348561U JP 14307186 U JP14307186 U JP 14307186U JP 14307186 U JP14307186 U JP 14307186U JP S6348561 U JPS6348561 U JP S6348561U

Authority

JP

Japan

Prior art keywords

plate

quartz tube

tube heater

plate provided

provided above

Prior art date

1986-09-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 4
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
• 238000002791 soaking Methods 0.000 description 1