JPS6347497B2 - - Google Patents

Info

Publication number
JPS6347497B2
JPS6347497B2 JP60297598A JP29759885A JPS6347497B2 JP S6347497 B2 JPS6347497 B2 JP S6347497B2 JP 60297598 A JP60297598 A JP 60297598A JP 29759885 A JP29759885 A JP 29759885A JP S6347497 B2 JPS6347497 B2 JP S6347497B2
Authority
JP
Japan
Prior art keywords
gas
waste gas
halogen
soda lime
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60297598A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62152519A (ja
Inventor
Takao Yagi
Chitoshi Nogami
Kunihiko Koike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwatani Corp
Original Assignee
Iwatani Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwatani Corp filed Critical Iwatani Corp
Priority to JP60297598A priority Critical patent/JPS62152519A/ja
Publication of JPS62152519A publication Critical patent/JPS62152519A/ja
Publication of JPS6347497B2 publication Critical patent/JPS6347497B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP60297598A 1985-12-26 1985-12-26 ハロゲン系廃ガスの乾式処理方法 Granted JPS62152519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60297598A JPS62152519A (ja) 1985-12-26 1985-12-26 ハロゲン系廃ガスの乾式処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60297598A JPS62152519A (ja) 1985-12-26 1985-12-26 ハロゲン系廃ガスの乾式処理方法

Publications (2)

Publication Number Publication Date
JPS62152519A JPS62152519A (ja) 1987-07-07
JPS6347497B2 true JPS6347497B2 (enrdf_load_stackoverflow) 1988-09-22

Family

ID=17848631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60297598A Granted JPS62152519A (ja) 1985-12-26 1985-12-26 ハロゲン系廃ガスの乾式処理方法

Country Status (1)

Country Link
JP (1) JPS62152519A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5417934A (en) * 1988-06-04 1995-05-23 Boc Limited Dry exhaust gas conditioning
GB8813270D0 (en) * 1988-06-04 1988-07-06 Plasma Products Ltd Dry exhaust gas conditioning
US5110580A (en) * 1989-09-14 1992-05-05 Iolab Corporation Method and apparatus for chlorine dioxide manufacture
JPH06177B2 (ja) * 1990-02-05 1994-01-05 株式会社荏原総合研究所 Ｃ１ｆ▲下３▼を含有する排ガスの処理方法
JPH09267027A (ja) * 1996-03-29 1997-10-14 Japan Pionics Co Ltd 有害ガスの浄化剤
CN1309619A (zh) * 1998-04-09 2001-08-22 Uhp材料有限公司 乙硼烷的制备和纯化
US6060034A (en) * 1998-06-02 2000-05-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for ClF3 containing exhaust gases
US6309618B1 (en) 1999-03-12 2001-10-30 Showa Denko K. K. Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus
JP5238299B2 (ja) * 2008-03-10 2013-07-17 東洋炭素株式会社 フッ素ガス発生装置
JP5170040B2 (ja) * 2009-09-01 2013-03-27 株式会社日立製作所 Ｈｆ含有ガスの乾式処理装置及び処理方法
JP2018103156A (ja) * 2016-12-28 2018-07-05 大陽日酸株式会社 排ガス処理用カラム、排ガス処理装置及び排ガス処理方法
JP7164992B2 (ja) * 2018-08-21 2022-11-02 株式会社荏原製作所 希ガス回収装置

Also Published As

Publication number Publication date
JPS62152519A (ja) 1987-07-07

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