JPS6346845U - - Google Patents

Info

Publication number
JPS6346845U
JPS6346845U JP14051486U JP14051486U JPS6346845U JP S6346845 U JPS6346845 U JP S6346845U JP 14051486 U JP14051486 U JP 14051486U JP 14051486 U JP14051486 U JP 14051486U JP S6346845 U JPS6346845 U JP S6346845U
Authority
JP
Japan
Prior art keywords
holding means
sample holding
arm
rotary arm
specimens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14051486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14051486U priority Critical patent/JPS6346845U/ja
Publication of JPS6346845U publication Critical patent/JPS6346845U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP14051486U 1986-09-16 1986-09-16 Pending JPS6346845U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14051486U JPS6346845U (US20080293856A1-20081127-C00150.png) 1986-09-16 1986-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14051486U JPS6346845U (US20080293856A1-20081127-C00150.png) 1986-09-16 1986-09-16

Publications (1)

Publication Number Publication Date
JPS6346845U true JPS6346845U (US20080293856A1-20081127-C00150.png) 1988-03-30

Family

ID=31047430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14051486U Pending JPS6346845U (US20080293856A1-20081127-C00150.png) 1986-09-16 1986-09-16

Country Status (1)

Country Link
JP (1) JPS6346845U (US20080293856A1-20081127-C00150.png)

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