JPS6346835U - - Google Patents

Info

Publication number

JPS6346835U

JPS6346835U JP13969686U JP13969686U JPS6346835U JP S6346835 U JPS6346835 U JP S6346835U JP 13969686 U JP13969686 U JP 13969686U JP 13969686 U JP13969686 U JP 13969686U JP S6346835 U JPS6346835 U JP S6346835U

Authority

JP

Japan

Prior art keywords

raw material

gas introduction

introduction pipe

tube

vapor phase

Prior art date

1986-09-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000002994 raw material Substances 0.000 claims description 5
• 238000006243 chemical reaction Methods 0.000 claims description 3
• 125000002524 organometallic group Chemical group 0.000 claims 2
• 238000001947 vapour-phase growth Methods 0.000 claims 2
• 238000000354 decomposition reaction Methods 0.000 claims 1
• 239000011521 glass Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
• 238000010438 heat treatment Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1