JPS6346466U - - Google Patents

Info

Publication number
JPS6346466U
JPS6346466U JP13886786U JP13886786U JPS6346466U JP S6346466 U JPS6346466 U JP S6346466U JP 13886786 U JP13886786 U JP 13886786U JP 13886786 U JP13886786 U JP 13886786U JP S6346466 U JPS6346466 U JP S6346466U
Authority
JP
Japan
Prior art keywords
support
ion source
pedestal
support mechanism
supports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13886786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13886786U priority Critical patent/JPS6346466U/ja
Publication of JPS6346466U publication Critical patent/JPS6346466U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13886786U 1986-09-10 1986-09-10 Pending JPS6346466U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13886786U JPS6346466U (US07709020-20100504-C00041.png) 1986-09-10 1986-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13886786U JPS6346466U (US07709020-20100504-C00041.png) 1986-09-10 1986-09-10

Publications (1)

Publication Number Publication Date
JPS6346466U true JPS6346466U (US07709020-20100504-C00041.png) 1988-03-29

Family

ID=31044235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13886786U Pending JPS6346466U (US07709020-20100504-C00041.png) 1986-09-10 1986-09-10

Country Status (1)

Country Link
JP (1) JPS6346466U (US07709020-20100504-C00041.png)

Similar Documents

Publication Publication Date Title
JPS6346466U (US07709020-20100504-C00041.png)
JPS6212324U (US07709020-20100504-C00041.png)
JPS6388624U (US07709020-20100504-C00041.png)
JPH0284687U (US07709020-20100504-C00041.png)
JPS61205307U (US07709020-20100504-C00041.png)
JPS6379126U (US07709020-20100504-C00041.png)
JPS63132898U (US07709020-20100504-C00041.png)
JPH02106153U (US07709020-20100504-C00041.png)
JPS63146631U (US07709020-20100504-C00041.png)
JPH0174781U (US07709020-20100504-C00041.png)
JPS6353868U (US07709020-20100504-C00041.png)
JPH0271514U (US07709020-20100504-C00041.png)
JPH0412421U (US07709020-20100504-C00041.png)
JPS63168898U (US07709020-20100504-C00041.png)
JPS6289694U (US07709020-20100504-C00041.png)
JPS645880U (US07709020-20100504-C00041.png)
JPH01125361U (US07709020-20100504-C00041.png)
JPS6383070U (US07709020-20100504-C00041.png)
JPH0225147U (US07709020-20100504-C00041.png)
JPS62168101U (US07709020-20100504-C00041.png)
JPS6377865U (US07709020-20100504-C00041.png)
JPS62187043U (US07709020-20100504-C00041.png)
JPH0456033U (US07709020-20100504-C00041.png)
JPS63157184U (US07709020-20100504-C00041.png)
JPS63198744U (US07709020-20100504-C00041.png)