JPS6346462U - - Google Patents

Info

Publication number

JPS6346462U

JPS6346462U JP13886686U JP13886686U JPS6346462U JP S6346462 U JPS6346462 U JP S6346462U JP 13886686 U JP13886686 U JP 13886686U JP 13886686 U JP13886686 U JP 13886686U JP S6346462 U JPS6346462 U JP S6346462U

Authority

JP

Japan

Prior art keywords

electron beam

evaporation

ion

substrate

deflection device

Prior art date

1986-09-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 4
• 239000010409 thin film Substances 0.000 claims description 4
• 238000005566 electron beam evaporation Methods 0.000 claims description 3
• 238000010894 electron beam technology Methods 0.000 claims description 3
• 238000010884 ion-beam technique Methods 0.000 claims description 2
• 238000001704 evaporation Methods 0.000 claims 2
• 230000008020 evaporation Effects 0.000 claims 2
• 239000000463 material Substances 0.000 claims 1
• 238000007738 vacuum evaporation Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000007740 vapor deposition Methods 0.000 description 2