JPS634380U - - Google Patents

Info

Publication number
JPS634380U
JPS634380U JP9951086U JP9951086U JPS634380U JP S634380 U JPS634380 U JP S634380U JP 9951086 U JP9951086 U JP 9951086U JP 9951086 U JP9951086 U JP 9951086U JP S634380 U JPS634380 U JP S634380U
Authority
JP
Japan
Prior art keywords
refrigerator
condensation
motor
cryopump
cold head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9951086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9951086U priority Critical patent/JPS634380U/ja
Publication of JPS634380U publication Critical patent/JPS634380U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP9951086U 1986-06-27 1986-06-27 Pending JPS634380U (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9951086U JPS634380U (US06272168-20010807-M00014.png) 1986-06-27 1986-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9951086U JPS634380U (US06272168-20010807-M00014.png) 1986-06-27 1986-06-27

Publications (1)

Publication Number Publication Date
JPS634380U true JPS634380U (US06272168-20010807-M00014.png) 1988-01-12

Family

ID=30968450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9951086U Pending JPS634380U (US06272168-20010807-M00014.png) 1986-06-27 1986-06-27

Country Status (1)

Country Link
JP (1) JPS634380U (US06272168-20010807-M00014.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9415325B2 (en) 2012-02-23 2016-08-16 Sumitomo Heavy Industries, Ltd. Cryopump, method of regenerating cryopump, and control device for cryopump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5922691A (ja) * 1982-07-27 1984-02-04 株式会社モルテン 管内洗浄具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5922691A (ja) * 1982-07-27 1984-02-04 株式会社モルテン 管内洗浄具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9415325B2 (en) 2012-02-23 2016-08-16 Sumitomo Heavy Industries, Ltd. Cryopump, method of regenerating cryopump, and control device for cryopump

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