JPS6343428U - - Google Patents

Info

Publication number

JPS6343428U

JPS6343428U JP13691186U JP13691186U JPS6343428U JP S6343428 U JPS6343428 U JP S6343428U JP 13691186 U JP13691186 U JP 13691186U JP 13691186 U JP13691186 U JP 13691186U JP S6343428 U JPS6343428 U JP S6343428U

Authority

JP

Japan

Prior art keywords

chuck

verneuil

supply means

manufacturing apparatus

processing liquid

Prior art date

1986-09-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 4
• 239000007788 liquid Substances 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims description 3
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
• 238000004140 cleaning Methods 0.000 claims 2
• 238000001035 drying Methods 0.000 claims 1
• 239000012530 fluid Substances 0.000 claims 1
• 238000005406 washing Methods 0.000 description 1

Cited By (3)