JPS6342460Y2 - - Google Patents
Info
- Publication number
- JPS6342460Y2 JPS6342460Y2 JP1872883U JP1872883U JPS6342460Y2 JP S6342460 Y2 JPS6342460 Y2 JP S6342460Y2 JP 1872883 U JP1872883 U JP 1872883U JP 1872883 U JP1872883 U JP 1872883U JP S6342460 Y2 JPS6342460 Y2 JP S6342460Y2
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- electron beam
- sample
- semiconductor detector
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 8
- 230000005284 excitation Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 238000000921 elemental analysis Methods 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1872883U JPS59125057U (ja) | 1983-02-10 | 1983-02-10 | Ｘ線分析装置を備えた電子顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1872883U JPS59125057U (ja) | 1983-02-10 | 1983-02-10 | Ｘ線分析装置を備えた電子顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59125057U JPS59125057U (ja) | 1984-08-23 |
| JPS6342460Y2 true JPS6342460Y2 (fr) | 1988-11-07 |
Family
ID=30149906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1872883U Granted JPS59125057U (ja) | 1983-02-10 | 1983-02-10 | Ｘ線分析装置を備えた電子顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59125057U (fr) |
-
1983
- 1983-02-10 JP JP1872883U patent/JPS59125057U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59125057U (ja) | 1984-08-23 |
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