JPS6342011A - Perpendicular magnetic recording head - Google Patents
Perpendicular magnetic recording headInfo
- Publication number
- JPS6342011A JPS6342011A JP18589286A JP18589286A JPS6342011A JP S6342011 A JPS6342011 A JP S6342011A JP 18589286 A JP18589286 A JP 18589286A JP 18589286 A JP18589286 A JP 18589286A JP S6342011 A JPS6342011 A JP S6342011A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic pole
- head
- main magnetic
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 239000010408 film Substances 0.000 claims description 39
- 239000010409 thin film Substances 0.000 claims description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 6
- 230000001681 protective effect Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 11
- 238000000059 patterning Methods 0.000 description 9
- 239000002184 metal Substances 0.000 description 7
- 239000010410 layer Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005498 polishing Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 229910020641 Co Zr Inorganic materials 0.000 description 1
- 229910020520 Co—Zr Inorganic materials 0.000 description 1
- 240000008168 Ficus benjamina Species 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Abstract
Description
【発明の詳細な説明】
技術分野
本発明は、垂直磁気記録又は再生に用いられる垂直磁気
記録ヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a perpendicular magnetic recording head used for perpendicular magnetic recording or reproduction.
従来技術
近年、磁気記録/再生については、その高密度化の点な
どから垂直磁気記録方式が注目されており、そのヘッド
構造も薄膜技術が活用されている。BACKGROUND OF THE INVENTION In recent years, perpendicular magnetic recording has attracted attention for magnetic recording/reproduction due to its high density, and thin film technology has been utilized for its head structure.
この種のヘッドとしては、例えば「第8回日本応用磁気
学会学術講演概要集(1984,11)J中の「垂直リ
ジットディスク用単磁極薄膜ヘッド(15aB−11)
Jに示されるものがある。第2図はこれを図示するもの
である。まず、ヘッド基板1上にアモルファスGo−Z
rによる主磁極膜2が形成されている。そして、この主
磁極膜2近傍にコイル3を形成し、かつ、主磁極2に接
触する状態であってコイル3を覆う状態に軟磁性材料に
よるヨーク4を形成し、全体を保護N5により覆ってな
るものである。This type of head includes, for example, "Single-pole thin film head for vertical rigid disks (15aB-11)" in the 8th Japanese Society of Applied Magnetics Academic Conference Abstracts (1984, November) J.
There is one shown in J. FIG. 2 illustrates this. First, amorphous Go-Z is placed on the head substrate 1.
A main pole film 2 is formed of r. A coil 3 is formed near the main pole film 2, and a yoke 4 made of a soft magnetic material is formed in contact with the main pole 2 and covers the coil 3, and the whole is covered with a protective layer N5. It is what it is.
又、前述した同概要集中の「垂直磁気記録用8ターン薄
膜ヘツドの記録再生特性(15aB−13)」に示され
るものもある。第3図はこれを図示するものである。こ
れも基本的には第2図のものと同様であり、まず、ヘッ
ド基板6上にFe−5i −RuとN i −F eと
による2層構造の主磁極膜7が形成されている。そして
、SiO2による絶縁膜8を介してコイル9が形成され
、かつ、主磁極膜7に接触する状態でCo−Zr −’
v’Jによる補助磁極10が形成されている。11はP
I○等による絶縁膜である。There are also some characteristics shown in ``Recording and Reproducing Characteristics of 8 Turn Thin Film Head for Perpendicular Magnetic Recording (15aB-13)'' in the above-mentioned summary. FIG. 3 illustrates this. This is basically the same as that shown in FIG. 2, and first, a main pole film 7 having a two-layer structure of Fe-5i-Ru and Ni-Fe is formed on the head substrate 6. A coil 9 is formed via an insulating film 8 made of SiO2, and a Co-Zr −' coil is formed in contact with the main pole film 7.
An auxiliary magnetic pole 10 is formed by v'J. 11 is P
This is an insulating film made of I○ or the like.
これらは何れも主磁極励磁型垂直磁気記録ヘッドとして
構成されているものであるが、その製造には複雑な工程
を必要とし、生産性の悪いものとなっている。例えば、
第2図に示したヘッドの製造工程について説明する。All of these are constructed as main pole excitation type perpendicular magnetic recording heads, but their manufacture requires complicated processes, resulting in poor productivity. for example,
The manufacturing process of the head shown in FIG. 2 will be explained.
この製造工程は、
(1) ヘッド基板1の研磨
(2)主磁極膜2材料の成膜
(3)主磁極膜2材料をトラック幅にパターンニング
(4)主磁極膜2先端を必要とする厚さにエツチング
(5)絶縁膜を形成
(6) コイル3用の金属膜を形成
(7)金属膜をコイル3形状にパターンニング(8)絶
縁膜を形成
(9) ヨーク4用のコンタクトホールの形成(10)
ヨーク4用の軟磁性膜を成膜(11)軟磁性膜をヨ
ーク4形状にパターンニング(12)保護層5を成膜
(13)コイル3用のコンタクトホールの形成(14)
コイル3のリード線用金属膜を形成(15)金属膜
をリード線形状にパターンニング(16)切断
(17)端面の研磨
によるものである。第3図の場合も殆ど同様である。こ
のように多工程を必要としているものである。特に、パ
ターンニング工程だけでも7エ程も含まれているもので
ある。ここに、パターンニングは一般にレジスト塗布工
程、露光工程、エツチング工程及びレジスト除去工程を
必要とするため、実際の全工程数は最低でも30工程程
度必要としているものである。又、一般にコンタクトホ
ール用の穴あけ工程は技術的に難しいとされているが、
このようなコンタクトホール形成工程をも2工程必要と
しているものである。更には、このような多工程ととも
に、全体では6層にもわたる積層構造であり、種々の段
差がつきやすく、断線等のおそれが多くなり、歩留まり
を向上させるのは困難である。This manufacturing process requires: (1) Polishing the head substrate 1 (2) Forming the main pole film 2 material (3) Patterning the main pole film 2 material to the track width (4) The tip of the main pole film 2 Etching to thickness (5) Forming an insulating film (6) Forming a metal film for coil 3 (7) Patterning the metal film into the shape of coil 3 (8) Forming an insulating film (9) Contact hole for yoke 4 formation (10)
Forming the soft magnetic film for the yoke 4 (11) Patterning the soft magnetic film into the shape of the yoke 4 (12) Forming the protective layer 5 (13) Forming the contact hole for the coil 3 (14)
Forming a metal film for the lead wire of the coil 3 (15) Patterning the metal film into the shape of the lead wire (16) Cutting (17) Polishing the end face. The case of FIG. 3 is almost the same. As described above, it requires multiple steps. In particular, the patterning process alone includes seven steps. Here, since patterning generally requires a resist coating process, an exposure process, an etching process, and a resist removal process, the actual total number of processes is at least about 30 processes. Additionally, the process of drilling contact holes is generally considered to be technically difficult.
This contact hole forming process also requires two steps. Furthermore, in addition to such multiple steps, the overall structure is a stacked structure of six layers, which tends to have various steps, increases the risk of wire breakage, etc., and makes it difficult to improve the yield.
これは、例えば特公昭61−18249号公報に示され
るヘッド構造の場合も同様である。This also applies to the head structure disclosed in Japanese Patent Publication No. 61-18249, for example.
目的
本発明は、このような点に鑑みなされたもので、製造上
の工程数が少なく簡単であって生産性を向上させること
ができる垂直磁気記録ヘッドを得ることを目的とする。OBJECTS The present invention has been made in view of the above points, and it is an object of the present invention to provide a perpendicular magnetic recording head that requires fewer and simpler manufacturing steps and that can improve productivity.
構成
本発明は、上記目的を達成するため、薄膜形成される主
磁極膜を備えた垂直磁気記録ヘッドにおいて、ヘッド基
板の表面に対して主磁極膜厚み方向を平行に設定して主
磁極膜を形成したことを特徴とするものである。Structure In order to achieve the above object, the present invention provides a perpendicular magnetic recording head equipped with a main pole film formed as a thin film, in which the main pole film is set such that the thickness direction of the main pole film is parallel to the surface of the head substrate. It is characterized by the fact that it has been formed.
以下、本発明の一実施例を第1図に基づいて説明する。An embodiment of the present invention will be described below with reference to FIG.
従来方式がヘッド基板表面に対して主磁極膜長さ方向が
平行であるのに対し、本実施例は、主磁極厚さ方向が平
行となるように形成した点を特徴とする。ヘッド構成部
材は同様であり、ヘッド基板12、主磁極膜13、ヨー
ク14、絶縁層15、コイル16及び保護膜17により
構成される。In contrast to the conventional method in which the length direction of the main pole film is parallel to the surface of the head substrate, this embodiment is characterized in that the main pole film is formed so that the thickness direction thereof is parallel to the surface of the head substrate. The head constituent members are similar and are composed of a head substrate 12, a main pole film 13, a yoke 14, an insulating layer 15, a coil 16, and a protective film 17.
ここに、このようなヘッドの製造工程は、(1) ヘ
ッド基板12の研磨
(2)主磁極膜13及びヨーク14用の磁性膜材料の成
膜
(3)磁性膜材料をトラック幅、主磁極厚さ、主磁極長
さにエツチング(即ち、主磁極膜層の材料は通常通りヘ
ッド基板12上に成膜されるものであるが、このエツチ
ングにより、主磁極膜13の厚さ方向がヘッド基板12
表面に対して平行となり、長さ方向が垂直となる)(4
)絶縁層15の成膜
(5)コイル16用の金属膜を形成
(6)金属膜をコイル16形状にパターンニング(7)
保護膜17を成膜
(8)表面を研磨
(9)切断
(10)側面を研磨
(11) コイル16のリード線用金属膜を成膜(1
2) リード線形状にパターンニングによるものであ
る。このように12工程と少ない工程数で済むものであ
る。特に、パターンニング工程は3工程のみであり、実
際的な工程数としても従来の30工程程度に対して18
工程程度で済むものである。又、技術的に難しいコンタ
クトホール用の穴あけ工程は1つも含まないものでもあ
る。更には、全体的に4層構造に収まっている。Here, the manufacturing process of such a head is as follows: (1) Polishing the head substrate 12 (2) Forming a magnetic film material for the main pole film 13 and yoke 14 (3) Adjusting the magnetic film material to the track width and the main pole. Etching to the thickness and length of the main pole (that is, the material of the main pole film layer is normally deposited on the head substrate 12, but by this etching, the thickness direction of the main pole film 13 is aligned with the head substrate). 12
parallel to the surface, and the length direction is perpendicular) (4
) Forming the insulating layer 15 (5) Forming the metal film for the coil 16 (6) Patterning the metal film into the shape of the coil 16 (7)
Forming a protective film 17 (8) Polishing the surface (9) Cutting (10) Polishing the side surface (11) Forming a metal film for the lead wire of the coil 16 (1)
2) This is due to patterning of the lead wire shape. In this way, only 12 steps are needed, which is a small number of steps. In particular, the patterning process is only 3 steps, and the actual number of steps is 18 compared to the conventional 30 steps.
It only requires a few steps. Furthermore, it does not include any technically difficult drilling process for contact holes. Furthermore, the overall structure is within four layers.
これらの点を総合すると、従来方式に比べて主磁極膜1
3のヘッド基板12に対する方向性を変えるのみで、工
程数を大幅に減少させて生産性を向上させ、歩留まり向
上を図れるものとなる。Taking these points together, the main magnetic pole film 1 is smaller than the conventional method.
By simply changing the direction of No. 3 with respect to the head substrate 12, the number of steps can be significantly reduced, productivity can be improved, and yield can be improved.
効果
本発明は、上述したように主磁極膜をその厚さ方向がヘ
ッド基板表面に対して平行となるように設定して形成し
たので、ヘッド製造上の工程数を従来に比べて大幅に削
減することができ、かつ、難しい工程も減少ないし削除
されることとなり、よって、歩留まりがよく生産性の高
いヘッドとすることができるものである。Effects As described above, in the present invention, the main pole film is formed so that its thickness direction is parallel to the head substrate surface, so the number of head manufacturing steps is significantly reduced compared to the conventional method. In addition, difficult steps can be reduced or eliminated, so that a head with high yield and high productivity can be obtained.
第1図は本発明の一実施例を示す断面構成図、第2図は
従来例を示す断面構成図、第3図は異なる従来例を示す
断面構成図である。
12・・・ヘッド基板、13・・・主磁極膜−第1I
冴
、y33 ワFIG. 1 is a cross-sectional configuration diagram showing one embodiment of the present invention, FIG. 2 is a cross-sectional configuration diagram showing a conventional example, and FIG. 3 is a cross-sectional configuration diagram showing a different conventional example. 12... Head substrate, 13... Main magnetic pole film - 1st I
Sae, y33 wa
Claims (1)
おいて、ヘッド基板の表面に対して主磁極膜厚み方向を
平行に設定して主磁極膜を形成したことを特徴とする垂
直磁気記録ヘッド。1. A perpendicular magnetic recording head comprising a main pole film formed as a thin film, characterized in that the main pole film is formed with the thickness direction of the main pole film parallel to the surface of a head substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18589286A JPS6342011A (en) | 1986-08-07 | 1986-08-07 | Perpendicular magnetic recording head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18589286A JPS6342011A (en) | 1986-08-07 | 1986-08-07 | Perpendicular magnetic recording head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6342011A true JPS6342011A (en) | 1988-02-23 |
Family
ID=16178704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18589286A Pending JPS6342011A (en) | 1986-08-07 | 1986-08-07 | Perpendicular magnetic recording head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6342011A (en) |
-
1986
- 1986-08-07 JP JP18589286A patent/JPS6342011A/en active Pending
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