JPS6340664U - - Google Patents

Info

Publication number
JPS6340664U
JPS6340664U JP13296886U JP13296886U JPS6340664U JP S6340664 U JPS6340664 U JP S6340664U JP 13296886 U JP13296886 U JP 13296886U JP 13296886 U JP13296886 U JP 13296886U JP S6340664 U JPS6340664 U JP S6340664U
Authority
JP
Japan
Prior art keywords
bypass
valve
main valve
box
advancing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13296886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235102Y2 (US20100056889A1-20100304-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13296886U priority Critical patent/JPH0235102Y2/ja
Publication of JPS6340664U publication Critical patent/JPS6340664U/ja
Application granted granted Critical
Publication of JPH0235102Y2 publication Critical patent/JPH0235102Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Details Of Valves (AREA)
JP13296886U 1986-08-30 1986-08-30 Expired JPH0235102Y2 (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13296886U JPH0235102Y2 (US20100056889A1-20100304-C00004.png) 1986-08-30 1986-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13296886U JPH0235102Y2 (US20100056889A1-20100304-C00004.png) 1986-08-30 1986-08-30

Publications (2)

Publication Number Publication Date
JPS6340664U true JPS6340664U (US20100056889A1-20100304-C00004.png) 1988-03-16
JPH0235102Y2 JPH0235102Y2 (US20100056889A1-20100304-C00004.png) 1990-09-21

Family

ID=31032848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13296886U Expired JPH0235102Y2 (US20100056889A1-20100304-C00004.png) 1986-08-30 1986-08-30

Country Status (1)

Country Link
JP (1) JPH0235102Y2 (US20100056889A1-20100304-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004044969A1 (ja) * 2001-05-14 2004-05-27 Tokyo Electron Limited 弁装置および熱処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004044969A1 (ja) * 2001-05-14 2004-05-27 Tokyo Electron Limited 弁装置および熱処理装置
CN100397577C (zh) * 2001-05-14 2008-06-25 东京毅力科创株式会社 阀装置和热处理装置

Also Published As

Publication number Publication date
JPH0235102Y2 (US20100056889A1-20100304-C00004.png) 1990-09-21

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