JPS6339942U - - Google Patents

Info

Publication number
JPS6339942U
JPS6339942U JP13452586U JP13452586U JPS6339942U JP S6339942 U JPS6339942 U JP S6339942U JP 13452586 U JP13452586 U JP 13452586U JP 13452586 U JP13452586 U JP 13452586U JP S6339942 U JPS6339942 U JP S6339942U
Authority
JP
Japan
Prior art keywords
substrate
mass sensor
conveys
absence
supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13452586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13452586U priority Critical patent/JPS6339942U/ja
Publication of JPS6339942U publication Critical patent/JPS6339942U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP13452586U 1986-09-01 1986-09-01 Pending JPS6339942U (US07652168-20100126-C00068.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13452586U JPS6339942U (US07652168-20100126-C00068.png) 1986-09-01 1986-09-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13452586U JPS6339942U (US07652168-20100126-C00068.png) 1986-09-01 1986-09-01

Publications (1)

Publication Number Publication Date
JPS6339942U true JPS6339942U (US07652168-20100126-C00068.png) 1988-03-15

Family

ID=31035844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13452586U Pending JPS6339942U (US07652168-20100126-C00068.png) 1986-09-01 1986-09-01

Country Status (1)

Country Link
JP (1) JPS6339942U (US07652168-20100126-C00068.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021504969A (ja) * 2017-11-30 2021-02-15 チャイナ トライアンフ インターナショナル エンジニアリング カンパニー リミテッドChina Triumph International Engineering Co.,Ltd. 密閉チャンバ内での基板位置を判定する方法およびこの方法を実行する装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021504969A (ja) * 2017-11-30 2021-02-15 チャイナ トライアンフ インターナショナル エンジニアリング カンパニー リミテッドChina Triumph International Engineering Co.,Ltd. 密閉チャンバ内での基板位置を判定する方法およびこの方法を実行する装置

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