JPS6339934U - - Google Patents

Info

Publication number
JPS6339934U
JPS6339934U JP13375986U JP13375986U JPS6339934U JP S6339934 U JPS6339934 U JP S6339934U JP 13375986 U JP13375986 U JP 13375986U JP 13375986 U JP13375986 U JP 13375986U JP S6339934 U JPS6339934 U JP S6339934U
Authority
JP
Japan
Prior art keywords
drive mechanism
shutter
filter
light irradiator
lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13375986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0246045Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986133759U priority Critical patent/JPH0246045Y2/ja
Publication of JPS6339934U publication Critical patent/JPS6339934U/ja
Application granted granted Critical
Publication of JPH0246045Y2 publication Critical patent/JPH0246045Y2/ja
Expired legal-status Critical Current

Links

JP1986133759U 1986-09-02 1986-09-02 Expired JPH0246045Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986133759U JPH0246045Y2 (en, 2012) 1986-09-02 1986-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986133759U JPH0246045Y2 (en, 2012) 1986-09-02 1986-09-02

Publications (2)

Publication Number Publication Date
JPS6339934U true JPS6339934U (en, 2012) 1988-03-15
JPH0246045Y2 JPH0246045Y2 (en, 2012) 1990-12-05

Family

ID=31034366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986133759U Expired JPH0246045Y2 (en, 2012) 1986-09-02 1986-09-02

Country Status (1)

Country Link
JP (1) JPH0246045Y2 (en, 2012)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321324A (en) * 1976-08-11 1978-02-27 Toyota Motor Corp Heater for engine intake
JPS59196735A (ja) * 1983-04-20 1984-11-08 Matsushita Electric Ind Co Ltd 紫外線照射装置
JPS6045247A (ja) * 1983-05-23 1985-03-11 フユージヨン・セミコンダクター・システムズ フオトレジストの硬化方法及び硬化装置
JPS6114724A (ja) * 1984-06-30 1986-01-22 Ushio Inc 半導体ウエハ−への紫外線照射方法
JPS62295420A (ja) * 1986-06-16 1987-12-22 Ushio Inc レジスト処理方法
JPS62295417A (ja) * 1986-06-16 1987-12-22 Ushio Inc レジスト処理方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321324A (en) * 1976-08-11 1978-02-27 Toyota Motor Corp Heater for engine intake
JPS59196735A (ja) * 1983-04-20 1984-11-08 Matsushita Electric Ind Co Ltd 紫外線照射装置
JPS6045247A (ja) * 1983-05-23 1985-03-11 フユージヨン・セミコンダクター・システムズ フオトレジストの硬化方法及び硬化装置
JPS6114724A (ja) * 1984-06-30 1986-01-22 Ushio Inc 半導体ウエハ−への紫外線照射方法
JPS62295420A (ja) * 1986-06-16 1987-12-22 Ushio Inc レジスト処理方法
JPS62295417A (ja) * 1986-06-16 1987-12-22 Ushio Inc レジスト処理方法

Also Published As

Publication number Publication date
JPH0246045Y2 (en, 2012) 1990-12-05

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