JPS6339392B2 - - Google Patents

Info

Publication number
JPS6339392B2
JPS6339392B2 JP58200911A JP20091183A JPS6339392B2 JP S6339392 B2 JPS6339392 B2 JP S6339392B2 JP 58200911 A JP58200911 A JP 58200911A JP 20091183 A JP20091183 A JP 20091183A JP S6339392 B2 JPS6339392 B2 JP S6339392B2
Authority
JP
Japan
Prior art keywords
pulleys
support member
wafer support
wound around
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58200911A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6094286A (ja
Inventor
Norio Kanai
Tsunehiko Tsubone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP20091183A priority Critical patent/JPS6094286A/ja
Publication of JPS6094286A publication Critical patent/JPS6094286A/ja
Publication of JPS6339392B2 publication Critical patent/JPS6339392B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Reciprocating Conveyors (AREA)
JP20091183A 1983-10-28 1983-10-28 ウエハ搬送装置 Granted JPS6094286A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20091183A JPS6094286A (ja) 1983-10-28 1983-10-28 ウエハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20091183A JPS6094286A (ja) 1983-10-28 1983-10-28 ウエハ搬送装置

Publications (2)

Publication Number Publication Date
JPS6094286A JPS6094286A (ja) 1985-05-27
JPS6339392B2 true JPS6339392B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-08-04

Family

ID=16432315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20091183A Granted JPS6094286A (ja) 1983-10-28 1983-10-28 ウエハ搬送装置

Country Status (1)

Country Link
JP (1) JPS6094286A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222906A (ja) * 1986-03-25 1987-09-30 Hitachi Electronics Eng Co Ltd ウエ−ハ搬送機構
JP2772920B2 (ja) * 1994-08-29 1998-07-09 日本サーボ株式会社 伸縮回転駆動装置
JP5102647B2 (ja) * 2008-02-21 2012-12-19 敬 齋藤 マニピュレータ機構
JP7461013B2 (ja) * 2019-12-24 2024-04-03 バキュームプロダクツ株式会社 搬送機構
JP7606184B2 (ja) * 2020-05-25 2024-12-25 公立大学法人秋田県立大学 伸縮装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4858560A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-11-22 1973-08-16

Also Published As

Publication number Publication date
JPS6094286A (ja) 1985-05-27

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